Experimental clarification of mobility determining factors in HfSiON CMISFETs with various film compositions

Technical Digest - International Electron Devices Meeting, IEDM

Volumn 2005, Issue , 2005, Pages 421-424

  Iijima, Ryosuke ^a   Takayanagi, Mariko ^a   Yamaguchi, Takeshi ^a   Koyama, Masato ^a   Nishiyama, Akira ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; CMOS INTEGRATED CIRCUITS; ELECTRIC FIELDS; SCATTERING;

FILM COMPOSITIONS; PULSE MEASUREMENT;

MISFET DEVICES;

EID: 33847715111     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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