Numerical development of ZnO/quartz love wave structure for gas contamination detection

IEEE Sensors Journal

Volumn 7, Issue 3, 2007, Pages 336-341

  Moreira, Felicidade ^a   El Hakiki, Mohamed ^a   Sarry, Frederic ^a   Le Brizoual, Laurent ^a   Elmazria, Omar ^a   Alnot, Patrick ^a  

^a INSTITUT JEAN LAMOUR   (France)

Author keywords

Gas sensor; Love wave; Zero TCF structure; ZnO

Indexed keywords

CHEMICAL SENSORS; ELECTROMECHANICAL COUPLING; LIQUIDS; PHOTORESISTORS; QUARTZ; TEMPERATURE DISTRIBUTION;

ELECTROMECHANICAL COUPLING COEFFICIENT; LOVE WAVE; MASS LOADING; ZERO TCF STRUCTURE;

ZINC OXIDE;

EID: 33847700954     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2006.890140     Document Type: Article

References (19)

1. K. Kalantar-Zadeh, D. A. Powell, W. Wlodarski, S. Ippolito, and K. Glatsis, "Comparison of layered based SAW sensors," Sens. Actuators B, vol. 91, pp. 303-308, 2003.
2. K. Kalantar-Zadeh, Y. Y. Chen, B. N. Fry, A. Trinchi, and W. Wlodarski, "A novel Love mode SAW sensor with ZnO layer operating in gas and liquid media," in Proc. IEEE Ultrasonics Syrup., 2001, pp. 353-356.
3. 2 structures," IEEE Trans. Ultrason., Ferroelectr. Freq. Control, vol. 48, no. 1, pp. 268-273, Jan. 2001.
4. 2- structures," Phys. Stat. Sol., vol. 170, no. 2, pp. R3-R4, 1998.
5. B. Jakoby and M. J. Vellekoop, "Reducing the temperature sensitivity of Love wave sensors," in Proc. IEEE Ultrason. Symp., 1998, pp. 447-450.
6. 3 selective layer for hydrogen sensing," Sens. Lett., vol. 1, pp. 33-36, 2003.
7. 3 selective layer," in Proc. 2003 IEE Int. Frequency Control Symp. and PDA Exhibition Jointly with 17th Eur. Frequency Time Forum.
8. B. Jakoby and M. J. Vellekoop, "Properties of Love waves: applications in sensors," Smart Mater. Struct., vol. 6, pp. 668-679, 1997.
9. G. L. Harding and J. Du, "Design and properties of quartz-based Love wave acoustic sensors incorporating silicon dioxide and PMMA guiding layers," Smart Mater. Struct., vol. 6, pp. 716-720, 1997.
10. F. Eschbach, D. Selassie, P. Sanchez, D. Tanzil, V. Tolani, M. Toofan, H. Liu, B. Greenebaum, M. Murray, and R. Villacorta, "ArF lithography reticle crystal growth contributing factors," in Proc. SPIE, 5567, pp. 497-505.
11. J. J. Campbell and W. R. Jones, "A method for estimating optimal crystal cuts and propagation directions for excitation of piezoelectric surface waves,"IEEE Sonics Ultrason., vol. SU-15, no. 4, pp. 209-217, 1968.
12. K. Ingebrigsten, "Surface waves in piezoelectrics," J. Appl. Phys., vol. 40, no. 7, pp. 2681-2686, 1969.
13. H. Nakahata, A. Hachigo, K. Higaki, S. Fujii, S. I. Shikata, and N. Fujimori, "Theoretical study on SAW characteristics of layered structures including a diamond layer," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 4, no. 2, pp. 362-375, 1995.
14. B. Auld, Acoustic Fields and Waves in Solids, 2nd ed. Melbourne, FL: Krieger, 1990.
15. J. D. Maines, E. G. S. Paige, A. F. Saundres, and A. S. Young, "Simple technique for the accurate determination of delay-time variations in acoustic surface wave structures," Electron. Lett., vol. 5, pp. 678-680, 1969.
16. G. Kovacs, G. W. Lubking, M. J. Vellekoop, and A. Venema, "Love waves for (bio)chemical sensing in liquids," in Proc. Ultrasonics Symp., 1992, pp. 281-285.
17. K. Korsah, C. L. Ma, and B. Dress, "Harmonic frequency analysis of SAW resonator chemical sensors: Application to the detection of carbon dioxide and humidity," Sens. Actuators B, vol. 50, pp. 110-116, 1998.
18. A. Talbi, F. Sarry, F. Moreira, M. Elhakiki, O. Elmazria, L. Le Brizoual, and P. Alnot, "Zero TCF ZnO/Quartz SAW structure for gas sensing applications," in Proc. 2004 IEEE Inter. Freq. Contr. Symp., pp. 542-545.
19. B. K. Sinha, "Propagation characteristics of surface waves in quartz and their influence on device performance," in Proc. Ultrasonics Symp., 1985, pp. 216-227.