Layered SAW nitrogen dioxide sensor based on a ZnO/36° YX LiTaO 3 structure with WO3 selective layer

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2003, Pages 931-934

  Ippolito, S J ^a,b   Kalantar Zadeh, K ^a,b   Trinchi, A ^a,b   Wlodarski, W ^a,b   Tobar, M ^c  

^a RMIT UNIVERSITY   (Australia)

^b CRC for Microtechnology   (Australia)

^c UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

36 YX LiTaO3; Gas sensing; Layered SAW; NO2; ZnO

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; AIR; CONTAMINATION; ELECTRIC CONDUCTANCE; MAGNETRON SPUTTERING; MOS DEVICES; NITROGEN COMPOUNDS; PERTURBATION TECHNIQUES; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS; STOICHIOMETRY; THIN FILMS; TRANSDUCERS; X RAY DIFFRACTION ANALYSIS;

36° YX LITAO3; GAS SENSING; LAYERED SAW; NO2; ZNO;

CHEMICAL SENSORS;

EID: 1542335657     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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