Zero TCF ZnO/Quartz SAW structure for gas sensing applications

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2005, Pages 542-545

  Talbi, A ^a   Sarry, F ^a   Moreira, F ^a   Elhakiki, M ^a   Elmazria, O ^a   Le Brizoual, L ^a   Alnot, P ^a  

^a INSTITUT JEAN LAMOUR   (France)

Author keywords

Gas sensing; K2; PFA; Quartz; ST 35 cut; TCF; ZnO

Indexed keywords

CHEMICAL SENSORS; COUPLINGS; ELECTROMECHANICAL DEVICES; QUARTZ; ZINC OXIDE;

GAS SENSING; K2; PFA; ST-35 CUT; TCF;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 28844494117     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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