Uniformity, composition, and surface tension in solution deposited PbZrxTi1-xO3 films

Journal of Materials Research

Volumn 22, Issue 1, 2007, Pages 103-112

  Etin, A ^a   Shter, G E ^a   Gelman, V ^a   Grader, G S ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; EVAPORATION; STABILIZATION; SURFACE TENSION; THIN FILMS;

CHEMICAL SOLUTION DEPOSITION; SPINNING STAGE;

LEAD COMPOUNDS;

EID: 33847642026     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0006     Document Type: Article

References (22)

1. P. Muralt: PZT thin films for microsensors and actuators, where do we stand? IEEE T. Ultrason. Ferr. 47, 903 (2000).
2. R.W. Schwartz, T. Schneller, and R. Waser: Chemical solution deposition of electronic oxide films. J.C.R. Chimie. 7, 433 (2004).
3. 3, PZT and PLZT thin films. Brit. Ceram. Proc. 36, 107 (1985).
4. G. Yi, M. Sayer: An acetic acid/water based sol-gel PZT process. J. Sol-Gel Sci. Technol. 6, 65 (1996).
5. 3. J. Mater. Chem. 1, 893 (1991).
6. 3 thin films. J. Mater. Sci. Lett. 14, 885 (1995).
7. Y.L. Tu and S.J. Milne: A study of process variables on the properties of PZT films produced by a single-layer sol-gel technique. J. Mater. Sci. 30, 2507 (1995).
8. N. Sriprang, D. Kaewchinda, J.D. Kennedy, and S.J. Milne: Processing and sol chemistry of a triol-based sol-gel route for preparing lead zirconate titanate thin films. J. Am. Ceram. Soc. 83, 1914 (2000).
9. A. Etin, G.E. Shter, G.M. Reisner, S. Baltianski, and G.S. Grader: Controlled elemental depth profile in sol-gel derived PZT films. J. Am. Ceram. Soc. 89, 2387 (2006).
10. A. Etin, G.E. Shter, G.M. Reisner, and G.S. Grader: Interrelation of ferroelectricity, morphology and thickness in soi-gel derived PZT films. J. Am. Ceram. Soc. (2006, in press).
11. D.P. Birnie: Rational solvent selection strategies to combat striation formation during spin coating of thin films. J. Mater. Res. 16, 1145 (2001).
12. A. Wu, I.M. Miranda Salvado, P.M. Vilarinho, J.L. Baptista, and A.J.D. Silvestre: Lead zirconate titanate stable stock solution: Characterization and applications. J. Sol-Gel. Sci. Technol. 19, 671 (2000).
13. M.L. Calzada, R. Sirera, F. Carmona, and B. Jimenez: Investigations of a diol-based sol-gel process for the preparation of lead titanate materials. J. Am. Ceram. Soc. 78, 1802 (1995).
14. J. Livage and C. Sanchez: Sol-gel chemistry. J. Non-Cryst. Solids 145, 11 (1992).
15. T. Kemmit and M. Daglish: Decomposition of coordinated acetylacetonate in lead zirconate titanate (PZT) precursor solutions. Inorg. Chem. 37, 2063 (1998).
16. N.B. Colthup, L.H. Daly, and S.E. Wiberley: Introduction to Infrared and Raman Spectroscopy, 3rd ed. (Academic Press, UK, 1990).
17. Y. Huang and K. Chou: Studies on the spin coating process of silica films. Ceram. Int. 29, 485 (2003).
18. D.E. Haas and D.P. Birnie: Evaluation of thermocapillary driving forces in the development of striations during the spin coating process. J. Mater. Sci. 37, 2109 (2002).
19. D.P. Birnie: Combined flow and evaporation during spin coating of complex solutions. J. Non-Cryst. Solids 218, 174 (1997).
20. L.E. Scriven and C.V. Sternling: Wine fingers. Nature 187, 186 (1960).
21. CRC Handbook of Chemistry and Physics, edited by D.R. Lide (Internet Version 2006, http://www.hbcpnetbase.com).
22. A.G. Emslie, F.T. Bonner, and L.G. Peck: Flow of a viscous liquid on a rotating disk. J. Appl. Phys. 29, 858 (1958).