Studies on the spin coating process of silica films

Ceramics International

Volumn 29, Issue 5, 2003, Pages 485-493

  Huang, Ya Yu ^a   Chou, Kan Sen ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Process window; Silica film; Spin coating

Indexed keywords

CATALYSTS; POLYMERIZATION; SPIN COATING; THERMODYNAMIC STABILITY;

SILICA FILMS;

SILICA;

EID: 0037843714     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0272-8842(02)00191-8     Document Type: Article

References (10)

1. Jeng S.P., Havemann R.H., Chang M.C. Proc. Mater. Res. Soc. Symp. 25:1994;337.
2. Smith D.M., Anderson J., Cho C.C., Johnston G.P., Jeng S.P. Proc. Mater. Res. Soc. Symp. 381:1995;261.
3. Nitta S.V., Jain A., Wayner P.C., Gill W.N., Plawsky J.L. J. Appl. Phys. 86(10):1999;5870.
4. Lawrence C.J., Zhou W. J. Non-Newtonian Fluid Mech. 39:1991;137.
5. Jo M.H., Hong J.K., Park H.H., Kim J.J., Hyun S.H., Hyun S.H., Choi S.Y. Thin Solid Films. 308-309:1997;490.
6. Vorotilov K., Petrovsky V., Vasiljev V. J. Sol-Gel Sci. Tech. 5:1995;173.
7. Hyun S.H., Kim J.J., Park H.H. J. Am. Ceram. Soc. 83(3):2000;533.
8. Emslie A.G., Bonner F.T., Peck L.G. J. Appl. Phys. 29(5):1958;858.
9. Ring T.A. Fundamentals of Ceramic Powder Processing and Synthesis. 1996;Academic Press, San Diego, USA.
10. Meyerhofer D. J. Appl. Phys. 79(7):1978;858.