CMOS-based monolithic controllers for smart sensors comprising micromembranes and microcantilevers

IEEE Transactions on Circuits and Systems I: Regular Papers

Volumn 54, Issue 1, 2007, Pages 141-152

  Barrettino, Diego ^a,b   Malcovati, Piero ^c   Graf, Markus ^d   Hafizovic, Sadik ^a   Hierlemann, Andreas ^a  

^a ETH ZURICH   (Switzerland)

^b EPFL   (Switzerland)

^c UNIVERSITY OF PAVIA   (Italy)

^d Sensirion AG   (Switzerland)

Author keywords

Analog circuit design; CMOS based microsensors; MEMS; Proportional (P) and proportional integral derivative (PID) control

Indexed keywords

CMOS INTEGRATED CIRCUITS; CONTROL SYSTEM SYNTHESIS; MEMS; MICROSENSORS; PROPORTIONAL CONTROL SYSTEMS; SENSOR ARRAYS; THREE TERM CONTROL SYSTEMS;

MICROCANTILEVERS; MICROMEMBRANES; MONOLITHIC CONTROLLERS;

SMART SENSORS;

EID: 33847612742     PISSN: 10577122     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCSI.2006.887457     Document Type: Article

References (44)

1. K. Warwick and D. Reeds, Industrial Digital Control Systems. London, U.K.: Peter Peregrinus, 1988.
2. D. Wilson, "16-bit DSP servo control with MC68HC16Z1," Microprocessors Microsyst., vol. 18, no. 2, pp. 109-117, 1994.
3. K. Astrom and H. Steingrimsson, "Implementation of a PID controller on a DSP," Texas Instruments Inc. Digital Signal Process. Products, 1990.
4. G. Norris, "Inside the 777," Flight Int., pp. 23-26, Apr. 1994.
5. G. Franklin, J. Powell, and A. Emami-Naeini, Feedback Control of Dynamic Systems. Reading, MA: Addison-Wesley, 1994.
6. J. B. M. Anderson, Optimal Control: Linear Quadratic Methods. Englewood Cliffs, NJ: Prentice-Hall, 1990.
7. R. Sanchez-Peña and M. Sznaier, Robust Systems Theory and Applications. New York: Wiley, 1998.
8. J.-J. Slotine and W. Li, Applied Nonlinear Control. Englewood Clifs, NJ: Prentice-Hall, 1991.
9. D. A. White and D. A. Sofge, Handbook of Intelligent Control Neural, Fuzzy, and Adaptive Approaches. New York: Van Nostrand Reinhold, 1992.
10. H. Hanselmann, "Implementation of digital controllers - A survey," Automatica, vol. 23, no. 1, pp. 7-32, 1987.
11. A. Oppenheim and R. Schafer, Discrete-Time Signal Processing. Englewood Cliffs, NJ: Prentice-Hall, 1989.
12. J. J. F. Rijns, "CMOS low-distortion high-frequency variable-gain amplifier," IEEE J. Solid-State Circuits, vol. 31, no. 7, pp. 1029-1034, Jul. 1996.
13. R. J. van de Plassche, "A wideband monolithic instrumentation amplifier," IEEE J. Solid-State Circuits, vol. SC-10, no. 6, pp. 424-431, Dec. 1975.
14. S. D. Willingham, K. W. Martin, and A. Ganesan, "A BiCMOS low-distortion 8-MHz low-pass filter," IEEE J. Solid-State Circuits, vol. 28, no. 12, pp. 1234-1245, Dec. 1993.
15. R. J. Baker, H. W. Li, and D. E. Boyce, CMOS Circuit Design, Layout, and Simulation. New York: IEEE Press, 1998.
16. A. Hierlemann, O. Brand, C. Hagleitner, and H. Baltes, "Microfabrication techniques for chemical/biosensors," Proc. IEEE, vol. 91, no. 6, pp. 839-863, Jun. 2003.
17. J. S. Suehle, R. E. Cavicchi, M. Gaitan, and S. Semancik, "Tin oxide gas sensor fabricated using CMOS micro-hotplates and in situ processing," IEEE Electron Devices Lett., vol. 14, no. 3, pp. 118-120, Mar. 1993.
18. M. Graf, D. Barrettino, S. Taschini, C. Hagleitner, A. Hierlemann, and H. Baltes, "Metal oxide-based monolithic complementary metal oxide semiconductor gas sensor microsystem," Anal. Chem., vol. 76, pp. 4437-4445, 2004.
19. A. Heilig, N. Bârsan, U. Weimar, M. Schweizer-Berberich, J. W. Gardner, and W. Göpel, "Gas identification by modulating temperatures of SnO2-based thick film sensors," Sens. Actuators B, vol. 43, pp. 45-51, 1997.
20. T. A. Kunt, T. J. McAvoy, R. E. Cavicchi, and S. Semancik, "Optimization of temperature programmed sensing for gas identification using micro-hotplate sensors," Sens. Actuators B, vol. 53, pp. 24-43, 1998.
21. K. J. Astrom and T. Hagglund, PID Controllers: Theory, Design and Tuning, 2nd ed. Research Triangle Park, NC: Instrument Soc. America,, 1995.
22. I. Rusnak, "The optimality of PID controllers," in Proc. 9th Mediterranean Electrotechnical Conf., Tel-Aviv, 1998, pp. 479-483.
23. G. Storti-Gajani, "Some proposals for VLSI implementation of digital PID controllers with some fault-tolerance capabilities," Microprocessing Microprogramming, vol. 27, pp. 793-796, 1989.
24. K. Prasad and A. E. Raj, "VLSI implementation of digital compensators and predictive PID controllers,A" in Proc. Electro/94 Int. Conf., 1994, pp. 670-688.
25. T. H. Akkermans and S. G. Stan, "Digital servo IC for optical disc drives," Control Eng. Practice, vol. 9, pp. 1245-1253, 2001.
26. J. Gómez-Campomanes, Sistemas Digitales de Control: Análisis y Diseño (in Spanish). Oviedo, Spain: Universidad de Oviedo, Servicio de Publicaciones, 1998.
27. R. Zimmermann, Lectures Notes on Computer Arithmetic: Principles, Architectures, and VLSI Design. Zürich, Switzerland: Integrated Systems Lab., 1999.
28. Simulink User's Guide for Microsoft Windows. Natick, MA: The Math Works Inc., 1993.
29. S. Sjoholm and L. Lindh, VHDL for Designers. London, U.K.: Prentice-Hall, 1997.
30. P. J. Ashenden, The Designer's Guide to VHDL, 2nd ed. New York: Academic, 2002.
31. J. G. Ziegler and N. B. Nichols, "Optimum settings for automatic controllers," ASME J. Dynam. Syst., Meas., Control, vol. 62, pp. 759-768, 1942.
32. D. E. Rivera, M. Morari, and S. Skogestad, "Internal model control. 4. PID controller design," Ind. Eng. Chem. Res., vol. 25, no. 1, pp. 252-265, 1986.
33. K. Ogata, Modern Control Engineering. Englewood Cliffs, NJ: Prentice-Hall, 1990.
34. W. K. Ho, T. H. Lee, H. P. Han, and Y. Homg, "Self-tuning IMC-PID control with interval gain and phase margin assignments," IEEE Trans. Control Syst. Technol., vol. 9, no. 3, pp. 535-541, May 2001.
35. L. Wang, T. J. D. Barnes, and W. R. Cluett, "New frequency-domain design method for PID controllers," in Proc. Inst. Elect. Eng. Control Theory Applic., 1995, vol. 142, no. 4, pp. 265-271.
36. K. Natarajan and A. F. Gilbert, "On direct PID controller tuning based on finite number of frequency response data," ISA Trans., vol. 36, no. 2, pp. 139-149, 1997.
37. S. C. Chen, "On the parameter setting of PI and PID controllers," in Proc. Int. IEEE/IAS Conf. Ind. Autom. Control: Emerging Technologies, Taipei, Taiwan, R.O.C., 1995, pp. 620-623.
38. M. Zhuang and D. P. Atherton, "Optimal PID controller settings using integral performance criteria," in Proc. Amer. Control Conf., Boston, MA, 1991, pp. 3024-3043.
39. G. P. Liu and S. Daley, "Optimal-tuning PID control for industrial systems," Control Eng. Practice, vol. 9, no. 11, pp. 1185-1194, 2001.
40. L. S. Su, "Controllers - Tune them right," in Proc. IEEE Nat. Aerosp. Electron. Conf., 1991, vol. 2, pp. 564-570.
41. M. T. Ho, A. Datta, and S. P. Bhattacharyya, "A linear programming characterization of all stabilizing PID controllers," in Proc. Amer. Control Conf., Albuquerque, NM, 1997, pp. 3922-3928.
42. U. Brunner, Control Theory Using Matlab®, Student Edition ed. Upper Saddle River, NJ: Prentice-Hall, 2000.
43. D. Barrettino, S. Hafizovic, T. Volden, J. Sedivy, K. U. Kirstein, and A. Hierlemann, "CMOS monolithic mechatronic microsystem for surface imaging and force response studies," IEEE J. Solid-State Circuits, vol. 40, no. 4, pp. 951-959, Apr. 2005.
44. S. Hafizovic, D. Barrettino, T. Volden, J. Sedivy, K. Kirstein, O. Brand, and A. Hierlemann, "Single-chip mechatronic microsystem for surface imaging and force response studies," in Proc. Nat. Acad. Sci., 2004, vol. 101, no. 49, pp. 17011-17015.