Measuring in-plane and out-of-plane coupled motions of microstructures by stroboscopic microscopic interferometry

Optics and Laser Technology

Volumn 39, Issue 6, 2007, Pages 1176-1182

  Hu, Xiaodong ^a   Hu, Chunguang ^a   Chen, Zhi ^a   Guo, Tong ^a   Hu, Xiaotang ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

Coupled motions; Microscopic interferometry; Stroboscopic illumination

Indexed keywords

INTERFEROMETRY; LIGHTING; OPTICAL RESONATORS; PHASE SHIFT; STROBOSCOPES;

INTERFEROGRAMS; MICRORESONATORS; MICROSCOPIC INTERFEROMETRY; MOTION PHASES; PERIODIC MOTION; STROBOSCOPIC IMAGING;

MICROSTRUCTURE;

EID: 33847371226     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlastec.2006.08.013     Document Type: Article

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