Study of focused ion beam response of GaSb

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 255, Issue 2, 2007, Pages 309-313

  Lugstein, A ^a   Schoendorfer, C ^a   Weil, M ^a   Tomastik, C ^a   Jauss, A ^b   Bertagnolli, E ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b WITec Wissenschaftliche Instrumente und Technologie GmbH   (Germany)

Author keywords

FIB; GaSb; Ion bombardment; Ion sputtering; Nanostructures; Nanowires

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ION BEAMS; ION BOMBARDMENT; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY;

CATALYTIC VAPOR LIQUID; CUBIC ZINC BLEND; ION SPUTTERING; MICROTEXTURE; NANOWIRES; SUBSURFACE CAVITIES;

GALLIUM COMPOUNDS;

EID: 33847250530     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.11.116     Document Type: Article

References (29)

1. Hirayama Y., and Okamoto H. J. Vac. Sci. Technol. B 6 (1988) 1019
2. Chason E., et al. Phys. Rev. Lett. 72 (1994) 3040
3. Carter G., and Vishnyakov V. Phys. Rev. B 54 (1996) 17647
4. Jiang Z.X., and Alkemade P.F.A. Appl. Phys. Lett. 73 (1998) 315
5. Erlebacher J., Aziz M.J., Chason E., Sinclair M.B., and Floro J.A. Phys. Rev. Lett. 82 (1999) 2330
6. Rusponi S., Boragno C., and Valbusa U. Phys. Rev. Lett. 78 (1997) 2795
7. Rusponi S., Constantini G., Boragno C., and Valbusa U. Phys. Rev. Lett. 78 (1997) 2795
8. Rusponi S., Constantini G., Boragno C., and Valbusa U. Phys. Rev. Lett. 81 (1998) 4184
9. Mayer T.M., Chason E., and Howard A.J. J. Appl. Phys. 76 (1994) 1633
10. Habenicht S., Bolse W., Lieb K.P., Reimann K., and Geyer U. Phys. Rev. B 60 (1999) R2200
11. Lugstein A., Basnar B., and Bertagnolli E. J. Vac. Sci. Technol. B 22 (2004) 888
12. Callec R., and Poudoulec A. J. Appl. Phys. 73 (1993) 4831
13. Lugstein A., Weil M., Basnar B., Tomastik C., and Bertagnolli E. Nucl. Instr. and Meth. 222/1-2 (2004) 91
14. Callec R., Favennec P.N., Salvi M., L'Haridon H., and Gauneau M. Appl. Phys. Lett. 59 (1991) 1872
15. Facso S., Dekorsky T., Koerdt C., Trappe C., Kurz H., Vogt A., and Hartnagel H.L. Science 285 (1999) 1551
16. Homma Y. J. Vac. Sci. Technol. A 5 (1987) 321
17. Nitta N., and Taniwaki M. Nucl. Instr. and Meth. B 206 (2003) 482
18. Nitta N., Taniwaki M., Suzuki T., Hayashi Y., Satoh Y., and Yoshiie T. J. Jpn. Inst. Met. 64 (2000) 1141
19. Milnes A.G., and Polyakov A.Y. Solid State Electron. 36 (1993) 808
20. Lipp S., Frey L., Lehrer C., Frank B., Demm E., and Ryssel H. J. Vac. Sci. Technol. B 14 6 (1996) 3996
21. Callec R., Favennec P.N., Salvi M., L'Haridon H., and Gauneau M. Appl. Phys. Lett. 59 (1991) 1872
22. The Powder Diffraction File. International Centre for Diffraction Data, 12 Campus Boulevard, Newton Square, Pennsylvania 19073-3273 U.S.A.
23. Liu F., and Zhang L. J. Cryst. Growth 204 (1999) 19
24. Nemanich R.J., Solin S.A., and Martin R.M. Phys. Rev. B 23 (1981) 6348
25. Richter H., Wang Z.P., and Ley L. Solid State Commun. 39 (1981) 625
26. Campbell I.H., and Fauchet P.M. Solid State Commun. 58 (1986) 739
27. Raisin C., Rocher A., Landa G., Carles R., and Lassabatere L. Appl. Surf. Sci. 50 (1991) 434
28. Wagner R.S., and Ellis W.C. Appl. Phys. Lett. 4 (1964) 89
29. Pan Z.W., Dai Z.R., Ma C., and Wang Z.L. J. Am. Chem. Soc. 124 (2002) 1817