Novel nano-fabrication technique utilizing ion beam

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 482-485

  Nitta, Noriko ^a   Taniwaki, Masafumi ^a  

^a KOCHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Cellular structure; Focussed ion beam; Ion implantation; Nano fabrication; Self organization; Void

Indexed keywords

GALLIUM COMPOUNDS; INDIUM COMPOUNDS; ION BEAMS; ION IMPLANTATION; MOLECULAR BEAM EPITAXY; SELF ASSEMBLY;

CELLULAR STRUCTURE;

NANOTECHNOLOGY;

EID: 0038751725     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00802-4     Document Type: Conference Paper

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