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Volumn 13, Issue 5-6, 2007, Pages 495-501

Metal micromolding: Further experiments and preliminary finite element analysis

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; COATINGS; ELECTRIC DISCHARGE MACHINING; FINITE ELEMENT METHOD; HYDROGENATION; MICROSTRUCTURE;

EID: 33847245818     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0200-5     Document Type: Article
Times cited : (2)

References (19)
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    • (2001) J MEMS , vol.10 , pp. 107
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  • 4
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    • Microscale compression molding of Al with surface engineered LIGA inserts
    • Cao DM, Meng WJ (2004) Microscale compression molding of Al with surface engineered LIGA inserts, Microsyst Technol 10:662
    • (2004) Microsyst Technol , vol.10 , pp. 662
    • Cao, D.M.1    Meng, W.J.2
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    • Conformal deposition of Ti-containing hydrocarbon coatings over LiGA fabricated high-aspect-ratio micro-scale structures and tribological characteristics
    • Cao DM, Meng WJ, Simko SJ, Doll GL, Wang T, Kelly KW (2003a) Conformal deposition of Ti-containing hydrocarbon coatings over LiGA fabricated high-aspect-ratio micro-scale structures and tribological characteristics. Thin Solid Films 429:46
    • (2003) Thin Solid Films , vol.429 , pp. 46
    • Cao, D.M.1    Meng, W.J.2    Simko, S.J.3    Doll, G.L.4    Wang, T.5    Kelly, K.W.6
  • 7
    • 3042597834 scopus 로고    scopus 로고
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    • Cao DM, Meng WJ, Kelly KW (2004) High-temperature instrumented microscale compression molding of Pb. Microsyst Technol 10:323
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  • 9
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    • Chae J, Kulah H, Najafi K (2005) A CMOS-compatible high aspect ratio silicon-on-glass in-plane micro-accelerometer. J Micromech Microeng 15:336
    • (2005) J Micromech Microeng , vol.15 , pp. 336
    • Chae, J.1    Kulah, H.2    Najafi, K.3
  • 13
    • 22144437069 scopus 로고    scopus 로고
    • Stresses during micromolding of metals at elevated temperatures: Pilot experiments and a simple model
    • Meng WJ, Cao DM, Sinclair GB (2005) Stresses during micromolding of metals at elevated temperatures: pilot experiments and a simple model, J Mater Res 20:161
    • (2005) J Mater Res , vol.20 , pp. 161
    • Meng, W.J.1    Cao, D.M.2    Sinclair, G.B.3
  • 14
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.