Energy conservation measures for industrial facilities

HPAC Heating, Piping, AirConditioning Engineering

Volumn 75, Issue 7, 2003, Pages 45-46+48

  Lee, Alex H W ^a   Karman, Francisco ^a  

^a Frontier Associates   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR CONDITIONING; ENERGY CONSERVATION; ENERGY EFFICIENCY; ENVIRONMENTAL IMPACT; INDUSTRIAL ENGINEERING; INDUSTRIAL HEATING; OPERATIONS RESEARCH; PROCESS ENGINEERING; RESOURCE ALLOCATION; SEMICONDUCTOR DEVICE MANUFACTURE; VENTILATION;

GLOBAL SEMICONDUCTOR INDUSTRY; NONRENEWABLE SOURCE DEPLETION; SEMICONDUCTOR FABRICATION PLANT;

SYSTEMS ENGINEERING;

EID: 0041811697     PISSN: 15274055     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (6)

1. Robertson, C., et al (1998). Opportunities for Efficiency: The Northwest Microelectronics Industry. Report by Boneville Power Administration, Northwest Power Planning Council, and the Oregon Office of Energy.
2. U.S. EPA (1998). An Overview of Potential HVAC Energy Savings for Semiconductor Cleanrooms. United States Environmental Protection Agency. Proceedings Second U.S. EPA Semiconductor Energy Efficiency Opportunities Workshop, Austin, TX.
3. DeJule, R (January 1998). New Fab Construction: Flexible facility architecture, safety and energy usage concerns become paramount as costs soar. Semiconductor International.
4. W. M. Smith (1997). EPRI's Electronics Industry Target: Semiconductors/Tools United States Environmental Protection Agency. Proceedings Semiconductor Energy Efficiency Opportunities Workshop, San Jose, CA.
5. Tschudi, W., et al (2001) Cleanroom Energy Benchmarking in High-Tech and Biotech Industries. Proceedings ACEEE Summer Study on Energy Efficiency in Industry. Washington, D.C.
6. J. Busch (1997). Energy Efficiency Potential in Semiconductor Cleanrooms. Proceedings Semiconductor Energy Efficiency Opportunities Workshop, San Jose, CA.