Thickness dependent ferroelectric properties of BSTO thin films deposited by RF magnetron sputtering

Journal of Electroceramics

Volumn 17, Issue 2-4, 2006, Pages 141-144

  Ha, Jong Yoon ^a   Choi, Ji Won ^a   Kang, Chong Yun ^a   Karmanenko, S F ^c   Choi, Doo Jin ^b   Yoon, Seok Jin ^a   Kim, Hyun Jai ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Yonsei University   (South Korea)

^c SAINT PETERSBURG ELECTROTECHNICAL UNIVERSITY LETI   (Russian Federation)

Author keywords

BST; Ferroelectric; Microwave; RF sputtering; Tunable devices

Indexed keywords

BARIUM COMPOUNDS; DIELECTRIC PROPERTIES; MAGNETRON SPUTTERING; MICROWAVES; PERMITTIVITY; PEROVSKITE; THIN FILMS; VAPOR DEPOSITION;

FERROELECTRIC PERMITTIVITY; RADIO FREQUENCY SPUTTERING; TUNABLE DEVICES;

FERROELECTRICITY;

EID: 33847192500     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-006-9734-2     Document Type: Conference Paper

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