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Volumn 21, Issue 6, 2003, Pages 1829-1836

Mechanical and tribological properties of sub- and superstoichiometric Ti-C and Ti-Si-C films deposited by magnetron sputtering-pulsed laser deposition

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; CRYSTAL STRUCTURE; HARDNESS; INDENTATION; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; PULSED LASER DEPOSITION; STOICHIOMETRY; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0842290170     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1609459     Document Type: Article
Times cited : (6)

References (26)
  • 12
    • 0002207623 scopus 로고
    • edited by D. B. Chrisey and G. K. Hubler (Wiley, New York)
    • G. K. Hubler, in Pulsed Laser Deposition of Thin Films, edited by D. B. Chrisey and G. K. Hubler (Wiley, New York, 1994), pp. 327-354.
    • (1994) Pulsed Laser Deposition of Thin Films , pp. 327-354
    • Hubler, G.K.1
  • 21
    • 0842266892 scopus 로고    scopus 로고
    • JCPDS Data Cards (International Center for Diffraction Data, Swarthmore, PA)
    • JCPDS Data Cards (International Center for Diffraction Data, Swarthmore, PA 1988).
  • 26
    • 0000618791 scopus 로고
    • edited by D. B. Chrisey and G. K. Hubler (Wiley, New York)
    • K. L. Saenger, in Pulsed Laser Deposition of Thin FIlms, edited by D. B. Chrisey and G. K. Hubler (Wiley, New York, 1994), pp. 199-225.
    • (1994) Pulsed Laser Deposition of Thin FIlms , pp. 199-225
    • Saenger, K.L.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.