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Volumn 21, Issue 6, 2003, Pages 1829-1836
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Mechanical and tribological properties of sub- and superstoichiometric Ti-C and Ti-Si-C films deposited by magnetron sputtering-pulsed laser deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPOSITION EFFECTS;
CRYSTAL STRUCTURE;
HARDNESS;
INDENTATION;
MAGNETRON SPUTTERING;
MECHANICAL PROPERTIES;
PULSED LASER DEPOSITION;
STOICHIOMETRY;
TRANSMISSION ELECTRON MICROSCOPY;
TRIBOLOGY;
X RAY DIFFRACTION ANALYSIS;
X RAY PHOTOELECTRON SPECTROSCOPY;
CRYSTALLINITY;
MAXIMUM LASER POWER;
PIN ON DISK TESTING;
TITANIUM CARBIDE;
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EID: 0842290170
PISSN: 07342101
EISSN: None
Source Type: Journal
DOI: 10.1116/1.1609459 Document Type: Article |
Times cited : (6)
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References (26)
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