Ti-Si-C sputter deposited thin film coatings

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 341-346

  Gulbiński, Witold ^a   Gilewicz, Adam ^a   Suszko, Tomasz ^a   Warcholiński, Bogdan ^a   Kukliński, Zbigniew ^a  

^a KOSZALIN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

MAX ceramics; Microhardness; Thin films; Ti Si C system; Ti3SiC2; Tribology

Indexed keywords

FRICTION; GRAIN SIZE AND SHAPE; NANOSTRUCTURED MATERIALS; SEGREGATION (METALLOGRAPHY); SPUTTER DEPOSITION; TRIBOLOGY;

NANOPHASES; THIN FILM COATINGS;

THIN FILMS;

COATING; FILM THICKNESS; HARDNESS; LUBRICANT; TRIBOLOGY; WEAR RESISTANCE;

EID: 1842765544     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.084     Document Type: Article

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