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Volumn 209, Issue 1-2, 1996, Pages 337-344

Micro structure and performance of CVD κ-Al2O3 multilayers

Author keywords

Alumina; Chemical vapour deposition; Mechanical properties; Microstructure

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DISLOCATIONS (CRYSTALS); MECHANICAL PROPERTIES; MICROSTRUCTURE; MORPHOLOGY; POROSITY; SURFACE STRUCTURE;

EID: 0030149350     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-5093(95)10108-x     Document Type: Article
Times cited : (22)

References (26)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.