A 0.5 mm2 integrated capacitive vibration sensor a with sub-10 zF/rt-Hz noise floor

Proceedings of the Custom Integrated Circuits Conference

Volumn 2005, Issue , 2005, Pages 93-96

  Iyer, Sitaraman V ^a   Lakdawala, Hasnain ^a   Sinha, Rajarishi S ^a   Zacherl, Eric J ^a   Unetich, Richard T ^a   Gaugel, Daniel M ^a   Guillou, David F ^a   Carley, L Richard ^a,b  

^a IC Mechanics Inc   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC NOISE; BANDWIDTH; CMOS INTEGRATED CIRCUITS; NATURAL FREQUENCIES; VIBRATION MEASUREMENT;

CORRELATED DOUBLE SAMPLING (CDS); MICROMECHANICAL STRUCTURES; ROTATIONAL VIBRATIONS;

SENSORS;

EID: 33847125767     PISSN: 08865930     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/CICC.2005.1568616     Document Type: Conference Paper

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