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Volumn 3, Issue 4, 2003, Pages 383-392

Interface for MEMS-based rotational accelerometer for HDD applications with 2.5 rad/s2 Resolution and digital output

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ANALOG TO DIGITAL CONVERSION; BANDWIDTH; CAPACITANCE; HARD DISK STORAGE; MAGNETIC RECORDING; MICROMACHINING; SIGNAL DETECTION; SIGNAL FILTERING AND PREDICTION; VIBRATIONS (MECHANICAL);

EID: 3042823715     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2003.815785     Document Type: Article
Times cited : (29)

References (13)
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    • Lu, C.1    Lemkin, M.2    Boser, B.E.3
  • 2
    • 0027987532 scopus 로고
    • A 15 b electromechanical sigma-delta converter for acceleration measurements
    • San Francisco, CA, Feb.
    • T. Smith, O. Nys, M. Chevroulet, Y. DeCoulon, and M. Degrauwe, "A 15 b electromechanical sigma-delta converter for acceleration measurements," in ISSCC Dig. Tech Papers, San Francisco, CA, Feb. 1994, pp. 160-161.
    • (1994) ISSCC Dig. Tech Papers , pp. 160-161
    • Smith, T.1    Nys, O.2    Chevroulet, M.3    DeCoulon, Y.4    Degrauwe, M.5
  • 5
    • 0029234581 scopus 로고
    • An accelerometer interface circuit
    • Santa Clara, CA, May
    • C. J. Kemp and L. Spangler, "An accelerometer interface circuit," in CICC Dig. Tech. Papers, Santa Clara, CA, May 1995, pp. 345-348.
    • (1995) CICC Dig. Tech. Papers , pp. 345-348
    • Kemp, C.J.1    Spangler, L.2
  • 6
    • 0029723495 scopus 로고    scopus 로고
    • A micromachined fully differential lateral accelerometer
    • May
    • M. Lemkin and B. E. Boser, "A micromachined fully differential lateral accelerometer," in CICC Dig. Tech. Papers, May 1996, pp. 315-318.
    • (1996) CICC Dig. Tech. Papers , pp. 315-318
    • Lemkin, M.1    Boser, B.E.2
  • 7
    • 0030646879 scopus 로고    scopus 로고
    • A 3-axis force balanced accelerometer using a single proof-mass
    • Chicago, IL, June
    • M. Lemkin, B. E. Boser, D. M. Auslander, and J. H. Smith, "A 3-axis force balanced accelerometer using a single proof-mass," in Proc. Transducers, Chicago, IL, June 1997, pp. 1185-1188.
    • (1997) Proc. Transducers , pp. 1185-1188
    • Lemkin, M.1    Boser, B.E.2    Auslander, D.M.3    Smith, J.H.4
  • 9
    • 0030110593 scopus 로고    scopus 로고
    • Surface micromachined accelerometers
    • Mar.
    • B. E. Boser and R. T. Howe, "Surface micromachined accelerometers," IEEE J. Solid-State Circuits, vol. 31, pp. 366-375, Mar. 1996.
    • (1996) IEEE J. Solid-state Circuits , vol.31 , pp. 366-375
    • Boser, B.E.1    Howe, R.T.2
  • 10
    • 0029489783 scopus 로고
    • Embedded micromechanical devices for the monolithic integration of MEMS with CMOS
    • Dec.
    • J. H. Smith, S. Montague, J. J. Sniegowski, J. R. Murray, and P. J. McWhorter, "Embedded micromechanical devices for the monolithic integration of MEMS with CMOS," in Proc. IEDM, Dec. 1995, pp. 609-612.
    • (1995) Proc. IEDM , pp. 609-612
    • Smith, J.H.1    Montague, S.2    Sniegowski, J.J.3    Murray, J.R.4    McWhorter, P.J.5
  • 11
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    • Hernden, C.1
  • 12
    • 0043053056 scopus 로고    scopus 로고
    • Rejecting rotational disturbances on small disk drives using rotational accelerometers
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    • D. Y. Abramovitch, "Rejecting rotational disturbances on small disk drives using rotational accelerometers," in Proc. IFAC World Congr., San Francisco, CA, July 1996.
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  • 13
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.