Electrical properties of Bi2Mg2/3Nb 4/3O7 (BMN) pyrochlore thin films deposited on Pt and Cu metal at low temperatures for embedded capacitor applications

Applied Physics Letters

Volumn 90, Issue 5, 2007, Pages

  Xian, Cheng Ji ^a   Park, Jong Hyun ^a   Ahn, Kyung Chan ^a   Yoon, Soon Gil ^a   Lee, Jeong Won ^b   Kim, Woon Chun ^b   Lim, Sung Taek ^b   Sohn, Seung Hyun ^b   Moon, Jin Seok ^b   Jung, Hyung Mi ^b   Lee, Seung Eun ^b   Lee, In Hyung ^b   Chung, Yul Kyo ^b   Jeon, Min Ku ^c   Woo, Seong Ihl ^c  

^a Chungnam National University   (South Korea)

^b Samsung Electro Mechanics   (South Korea)

^c Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BISMUTH COMPOUNDS; CAPACITANCE; CAPACITORS; COPPER; DIELECTRIC LOSSES; ELECTRIC PROPERTIES; PERMITTIVITY; PLATINUM; PULSED LASER DEPOSITION;

CAPACITANCE DENSITY; DEPOSITION TEMPERATURE; EMBEDDED CAPACITOR APPLICATIONS;

THIN FILMS;

EID: 33846988580     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2435336     Document Type: Article

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