SCOPUS 정보 검색 플랫폼

Volumn 3, Issue 3, 2006, Pages 425-434

Effect of oxygen for ultra-thin la2O3 film deposition

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRODES; ELECTRON TRAPS; INTERFACES (MATERIALS); LANTHANUM COMPOUNDS; MOS CAPACITORS; ULTRATHIN FILMS;

FLAT-BAND VOLTAGE; LA-SILICATE; OXYGEN VACANCY;

OXYGEN;

EID: 33846964939 PISSN: 19385862 EISSN: 19386737 Source Type: Conference Proceeding
DOI: 10.1149/1.2355731 Document Type: Conference Paper

Times cited : (23)

References (13)

1
- 0004245602
- International Technology Roadmap for Semiconductors
- International Technology Roadmap for Semiconductors. "International Technology Roadmap for Semiconductors 2005 edition", (http://www.itrs.net/)
- International Technology Roadmap for Semiconductors 2005 edition

2
- 21644485273
- A. Callegari, P. Jamison, E. Carrier, S. Zafar, E. Gusev, V. Narayanan, C. D'Emic, D. Lacey, F. Mc. Feely, R. Jammy, M. Gribelyuk, J. Shepard, W. Andreoni, A. Curioni, C. Pignedoli, IEDM Tech. Dig, p. 825, (2004).
- (2004) IEDM Tech. Dig , pp. 825
- Callegari, A.¹ Jamison, P.² Carrier, E.³ Zafar, S.⁴ Gusev, E.⁵ Narayanan, V.⁶ D'Emic, C.⁷ Lacey, D.⁸ Feely, F.M.⁹ Jammy, R.¹⁰ Gribelyuk, M.¹¹ Shepard, J.¹² Andreoni, W.¹³ Curioni, A.¹⁴ Pignedoli, C.¹⁵

3
- 0037457115
- O. Renault, D. Samour, D. Rouchon, Ph. Holliger, A. -M. Papon, D. Blin and S. Marthon, Thin Solid Films, 428, 190 (2002).
- (2002) Thin Solid Films , vol.428 , pp. 190
- Renault, O.¹ Samour, D.² Rouchon, D.³ Holliger, P.⁴ Papon, A.-M.⁵ Blin, D.⁶ Marthon, S.⁷

4
- 0036567818
- J. Robertson, J. Non-Cryst. Solids, 303, 94, (2002).
- (2002) J. Non-Cryst. Solids , vol.303 , pp. 94
- Robertson, J.¹

5
- 29044435964
- D. H. Tryoso, R. I. Hegde, J. K. Schaeffer, D. Roan, B. E. White, Jr. and P. J. Tobin,J Vac. Sci. Technol. B, 23, 288, (2005).
- (2005) J Vac. Sci. Technol. B , vol.23 , pp. 288
- Tryoso, D.H.¹ Hegde, R.I.² Schaeffer, J.K.³ Roan, D.⁴ White Jr., B.E.⁵ Tobin, P.J.⁶

6
- 23844503318
- Daniel J. Lichtenwalner, Jesse S. Jur, Angus I. Kingon, Melody P. Agustin, Yan Yang, Susanne Stemmer, Lyudmila V. Goncharova, Torgny Gustafsson and Eric Garfunkel, J. Appl. Phys., 98, 024314 (2005).
- (2005) J. Appl. Phys , vol.98 , pp. 024314
- Lichtenwalner, D.J.¹ Jur, J.S.² Kingon, A.I.³ Agustin, M.P.⁴ Yang, Y.⁵ Stemmer, S.⁶ Goncharova, L.V.⁷ Gustafsson, T.⁸ Garfunkel, E.⁹

7
- 33846990344
- C. Y. Lin, M. W. Ma, Albert Chin, Y. C. Yeo, Chunxiang Zhu, M. F. Li, and Dim-Lee Kwong, Electron Device Lett., 24, 248 (2003).
- (2003) Electron Device Lett , vol.24 , pp. 248
- Lin, C.Y.¹ Ma, M.W.² Chin, A.³ Yeo, Y.C.⁴ Zhu, C.⁵ Li, M.F.⁶ Kwong, D.⁷

8
- 33748987198
- Masamichi Suzuki, Mitsuhiro Tomita, Takeshi Yamaguchi and Noboru Fukushima, IEDM Tech. Dig, p. 433, (2005)
- (2005) IEDM Tech. Dig , pp. 433
- Suzuki, M.¹ Tomita, M.² Yamaguchi, T.³ Fukushima, N.⁴

9
- 0842309722
- S. Saito, D. Hisamoto, S. Kimura and M. Hiratani, IEDM Tech. Dig., p. 797 (2003)
- (2003) IEDM Tech. Dig , pp. 797
- Saito, S.¹ Hisamoto, D.² Kimura, S.³ Hiratani, M.⁴

10
- 1142280285
- Theodosia Gougousi and Gregory N. Parsons, J. Appl. Phys., 95, 1391 (2004).
- (2004) J. Appl. Phys , vol.95 , pp. 1391
- Gougousi, T.¹ Parsons, G.N.²

11
- 33846998540
- NCSU CVC Analysis, Version 5.0, North Carolina State University, 2000
- "NCSU CVC Analysis, Version 5.0", (North Carolina State University, 2000).

12
- 23344445177
- Zhihong Zhang, Min Li, and Stephen A. Campbell, IEEE Transactions on Electron Devices, 52, 1839 (2005)
- (2005) IEEE Transactions on Electron Devices , vol.52 , pp. 1839
- Zhang, Z.¹ Li, M.² Campbell, S.A.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.