Use of in-situ spectroscopic ellipsometry to study the behaviour of metallic surfaces in different solutions

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5457, Issue , 2004, Pages 355-365

  Van Gils, Sake ^a   Pen, Christophe Le ^a   Blajiev, Orlin ^a   Melendres, Carlos ^b   Stijns, Erik ^a   Terryn, Herman ^a   Hubin, Annick ^a  

^a VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

^b SHD Institute   (United States)

Author keywords

Corrosion; Electrochemical polishing; In situ ellipsometry; Monitoring, metal

Indexed keywords

ELECTROLYTIC POLISHING; LIGHT POLARIZATION; REFRACTIVE INDEX; SOLUTIONS; SPECTROSCOPIC ANALYSIS; SURFACE ROUGHNESS; SURFACES; THIN FILMS;

METALLIC SURFACES; OXIDE SURFACES; SURFACE CORROSION;

ELLIPSOMETRY;

EID: 10044276887     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.545392     Document Type: Conference Paper

References (24)

1. R.M.A. Azzam and N.M. Bashara, Ellipsometry and polarised Light, North-Holland, Amsterdam, the Netherlands, 1977
2. K. Vedam, "Spectroscopic ellipsometry: a historical overview", Thin Solid Films, 313-314, 1, 1998
3. T.E. Jenkins, "Multiple-angle-of-incidence ellipsometry", J. Phys. D: Appl. Phys., 32, R45, 1999
4. G.E. Jellison Jr, "Data analysis for spectroscopic ellipsometry", Thin Solid Films, 234, 416 (1993)
5. H.G. Tompkins, W.A. McGahan, Spectroscopic ellipsometry and reflectometry, John Wiley, New York, USA, 1999
6. E. A. Irene, "In situ real-time characterization of surfaces and film growth processes via ellipsometry", In Situ Real-Time Characterisation of Thin Films, O. Auciello, A.R. Krauss, 57-103, Wiley, New York, USA, 2001
7. K. Hemmes, M.A. Hamstra, K.R. Koops, M.M. Wind, T. Schram, J. De Laet, H. Bender, "Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster", Thin Solid Films, 313-314, 40, 1998
8. E. D. Palik, Handbook of optical constants, Academic Press, Boston, USA, 1991
9. J. De Laet, J. Vanhellemont, H. Terryn, J. Vereecken," Characterization of various aluminium-oxide layers by means of spectroscopic ellipsometry", Appl. Phys. A, 54, 72, 1992
10. D. A. G. Bruggeman," Berechnung verschiedener physikalischer konstanten von heterogenen Substanzen", Anal. Phys., 5, 638, 1935
11. S.J. Fang, W. Chen, T. Yamanaka, C.R. Helms, "Comparison of Si surface roughness measured by atomic force microscopy and ellipsometry", Appl. Phys. Lett., 68, 2837, 1996
12. S. Van Gils, P. Mast, E. Stijns, H. Terryn, "Colour properties of barrier anodic oxide films on aluminium and titanium studied with total reflectance and spectroscopic ellipsometry", Surf. Coat. Technol., accepted
13. E. Van Gheem, J. Vereecken, C. Le Pen, "Influence of different anions on the behaviour of aluminium in aqueous solutions", J. Appl. Electrochem., 32, 1193, 2002
14. W. Tegart, Polissage électrolytique et chimique des métaux, Dunod, Paris, France, 1960
15. O. Piotrowski, C. Madore, D. Landolt, "Electropolishing of titanium and titanium alloys in perchlorate-free electrolytes", Plat. Surf. Finish., 85, 115, 1998
16. 2O studied by spectroscopic ellipsometry", J. Phys. Soc. Jpn., 67, 2125, 1998
17. rd ed., Addison-Wesley, Reading, USA, 1998
18. V. Brusic, M.A. Frisch, B.N. Eldridge, F.P. Novak, F.B. Kaufman, B.M. Rush, G.S. Frankel, "Copper corrosion with and without inhibitors", J. Electrochem. Soc., 138, 2253, 1991
19. C. Deslouis, B. Tribollet, G. Mengoli, M.M. Musiani, "Electrochemical behaviour of copper in neutral aerated chloride solution. I. Steady-state investigation", J. Appl. Electrochem., 18, 374, 1988
20. Guide to using WVASE 32, J.A. Woollam Co, Lincoln, NE, USA
21. G.H. Bu-Abbud, N.M. Bashara, J.A. Woollam," Variable wavelength, variable angle ellipsometry including a sensitivities correlation test", Thin Solid Films, 138, 27, 1986
22. A. Kolics, J.C. Polkinghome, A. Wieckowski, "Adsorption of sulfate and chloride ions on aluminum", Electrochim. Acta, 43, 2605, 1998
23. S. Van Gils, C.A. Melendres, H. Terryn, E. Stijns, "Use of in-situ spectroscopic ellipsometry to study aluminium/ oxide surface modifications in chloride and sulphuric solutions", Thin Solid Films, accepted
24. M. Novak, A.K.N. Reddy, H.Wroblowa, "An ellipsometric study of surface films on copper electrodes undergoing electropolishing", J. Electrochem. Soc., 117, 733, 1970