Morphology control of highly-transparent indium tin oxide thin films prepared by a chlorine-reduced metallo-organic decomposition technique

Thin Solid Films

Volumn 515, Issue 7-8, 2007, Pages 3797-3801

  Dippel, Ann Christin ^a   Schneller, Theodor ^a   Gerber, Peter ^a   Waser, Rainer ^a,b  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Chemical solution deposition; Indium tin oxide; Morphology evolution; Transparent conductive oxide

Indexed keywords

ANNEALING; COATINGS; DEPOSITION; FILM GROWTH; INDIUM COMPOUNDS; MORPHOLOGY;

CHEMICAL SOLUTION DEPOSITION; GRANULAR FILMS; INDIUM TIN OXIDE; MORPHOLOGY EVOLUTION; TRANSPARENT CONDUCTIVE OXIDE;

THIN FILMS;

EID: 33846901890     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.09.045     Document Type: Article

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