ITO films with enhanced electrical properties deposited on unheated ZnO-coated polymer substrates

Materials Science and Engineering: B

Volumn 118, Issue 1-3, 2005, Pages 66-69

  De Carvalho, C Nunes ^a,b   Lavareda, G ^a,b   Fortunato, E ^a   Alves, H ^a   Goncalves A ^a   Varela, J ^a   Nascimento, R ^a   Amaral, A ^b  

^a UNIVERSIDADE NOVA DE LISBOA   (Portugal)

^b INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

Electrical resistivity; Indium tin oxide (ITO); rf Plasma enhanced reactive thermal evaporation (rf PERTE); Room temperature; ZnO coated polymer substrates

Indexed keywords

CARRIER MOBILITY; DEPOSITION; ELECTRIC CONDUCTIVITY; EVAPORATION; INDIUM COMPOUNDS; LIGHT TRANSMISSION; PLASMA APPLICATIONS; POLYMERS; SCANNING ELECTRON MICROSCOPY; THERMAL EFFECTS; ULTRAVIOLET SPECTROPHOTOMETERS; ZINC OXIDE;

INDIUM TIN OXIDE (ITO) FILMS; RADIO FREQUENCY PLASMA ENHANCED REACTIVE THERMAL EVAPORATION; ROOM TEMPERATURE; ZNO-COATED POLYMER SUBSTRATES;

THIN FILMS;

EID: 15444366733     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2004.12.015     Document Type: Conference Paper

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