In situ observation by AFM of the morphology of copper metallization during electrodeposition

ECS Transactions

Volumn 1, Issue 11, 2006, Pages 25-39

  Breathnach, M ^a   Ahmed, S ^a   Nakahara, S ^a   Buckley, D N ^a  

^a UNIVERSITY OF LIMERICK   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL GROWTH; ELECTRODEPOSITION; ELECTRODES; METALLIZING; POLYCRYSTALLINE MATERIALS;

COPPER METALLIZATION; GOLD SUBSTRATES; GROWTH RATE;

COPPER COMPOUNDS;

EID: 33846783234     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2218475     Document Type: Conference Paper

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