Studies on MgxZn1-xO thin film resonator for mass sensor application

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn 2005, Issue , 2005, Pages 142-145

  Chen, Ying ^a   Saraf, Gaurav ^a   Wittstruck, Richard H ^a   Emanetoglu, Nuri W ^a   Lu, Yicheng ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; COMPOSITION; SCANNING ELECTRON MICROSCOPY; SENSORS; THIN FILMS; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

FIELD EMISSION SCANNING ELECTRON MICROSCOPY (FESEM); PRECISE TIME AND TIME INTERVAL (PTTI) SYSTEMS; THEORETICAL ANALYSIS;

ACOUSTIC RESONATORS;

EID: 33846573895     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2005.1573916     Document Type: Conference Paper

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