X-ray reflectivity investigation of interlayer at interfaces of multilayer structures: Application to Mo/Si multilayers

Bulletin of Materials Science

Volumn 29, Issue 7, 2006, Pages 693-700

  Nayak, M ^a   Lodha, G S ^a   Nandedkar, R V ^a  

^a RAJA RAMANNA CENTRE FOR ADVANCED TECHNOLOGY   (India)

Author keywords

Surfaces and interfaces; X ray multilayer; X ray photoelectron spectroscopy; X ray reflectivity

Indexed keywords

ELECTRON BEAMS; INTERFACES (MATERIALS); INTERMETALLICS; SURFACE ROUGHNESS; X RAY ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

INTERFACIAL ROUGHNESS; INTERLAYERS; MULTILAYER STRUCTURES; X RAY REFLECTIVITY (XRR);

MULTILAYERS;

EID: 33846533143     PISSN: 02504707     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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