Structural, mechanical and frictional properties of tetrahedral amorphous carbon film by filtered cathodic vacuum arc system

Surface and Coatings Technology

Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 4995-4998

  Yu, Xiang ^a   Zhang, Xu ^b   Wang, Cheng biao ^a   Liu, Fu tian ^c   Fu, Zhi qiang ^a  

^a CHINA UNIVERSITY OF GEOSCIENCES   (China)

^b BEIJING NORMAL UNIVERSITY   (China)

^c UNIVERSITY OF JINAN   (China)

Author keywords

Frictional property; Mechanical property; Microstructure; Tetrahedral amorphous carbon film

Indexed keywords

ADHESION; CARBON; CRYSTAL MICROSTRUCTURE; ELASTIC MODULI; FRICTION; MICROHARDNESS; MORPHOLOGY; TEXTURES; VACUUM APPLICATIONS;

FILTERED CATHODIC VACUUM ARC; FRICTION COEFFICIENT; TETRAHEDRAL AMORPHOUS CARBON;

AMORPHOUS FILMS;

ADHESION; AMORPHOUS FILMS; CARBON; CRYSTAL MICROSTRUCTURE; ELASTIC MODULI; FRICTION; MICROHARDNESS; MORPHOLOGY; TEXTURES; VACUUM APPLICATIONS;

EID: 33846512165     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.07.194     Document Type: Article

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