A tribological study of tetrahedral amorphous carbon films prepared by filtered cathodic vacuum arc technique

Vacuum

Volumn 75, Issue 3, 2004, Pages 231-236

  Yu, Xiang ^a   Zhang, Xu ^b   Wang, Cheng Biao ^a   Hua, Meng ^c   Wang, Li Guo ^d  

^a CHINA UNIVERSITY OF GEOSCIENCES   (China)

^b BEIJING NORMAL UNIVERSITY   (China)

^c CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^d Petroleum University of China   (China)

Author keywords

Filtered arc; Tetrahedral amorphous carbon; Tribological property

Indexed keywords

ADHESION; CARBON; CHROMIUM; CRACK INITIATION; DIAMOND FILMS; ELASTIC MODULI; FRICTION; INTERFACES (MATERIALS); SILICON; STAINLESS STEEL; TRIBOLOGY; VACUUM APPLICATIONS; WEAR OF MATERIALS;

FILTERED ARC; MECHANICAL PERFORMANCE; TETRAHEDRAL AMORPHOUS CARBON;

AMORPHOUS FILMS;

EID: 2942648685     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2004.03.003     Document Type: Article

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