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Volumn 298, Issue SPEC. ISS, 2007, Pages 18-22
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MOVPE growth investigations of doping and ordering in AlGaAs and GaInP with reflectance anisotropy spectroscopy
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Author keywords
A1. Doping; A1. Ordering; A1. Reflectance anisotropy spectroscopy; A3. Metalorganic vapour phase epitaxy; B1. AlGaAs; B1. AlGaInP
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Indexed keywords
ALUMINUM COMPOUNDS;
ANISOTROPY;
DOPING (ADDITIVES);
EPITAXIAL GROWTH;
MASS SPECTROMETERS;
REFLECTION;
ALGAAS;
ALGAINP;
ORDERING;
REFLECTANCE ANISOTROPY SPECTROSCOPY;
METALLORGANIC VAPOR PHASE EPITAXY;
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EID: 33846457010
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jcrysgro.2006.10.001 Document Type: Article |
Times cited : (9)
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References (12)
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