In-situ determination of the carrier concentration of (001) GaAs by reflectance anisotropy spectroscopy

Physica Status Solidi (A) Applied Research

Volumn 188, Issue 4, 2001, Pages 1423-1429

  Pristovsek, M ^a   Tsukamoto, S ^a   Koguchi, N ^a   Han, B ^b   Haberland, K ^b   Zettler, J T ^b   Richter, W ^b   Zorn, M ^c   Weyers, M ^c  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^c LEIBNIZ INSTITUT FÜR HÖCHSTFREQUENZTECHNIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001539130     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396X(200112)188:4<1423::AID-PSSA1423>3.0.CO;2-M     Document Type: Article

References (15)

1. J.-T. ZETTLER, Prog. Cryst. Growth Charact. Mater. 35, 27 (1997).
2. K. PLOSKA, J.-T. ZETTLER, W. RICHTER, F. REINHARDT, J. RUMBERG, M. PRISTOVSEK, M. ZORN, D. WESTWOOD, and R. WILLIAMS, J. Cryst. Growth 145, 44 (1994).
3. H. TANAKA, E. COLAS, I. KAMIYA, D. ASPNES, and R. BHAT, Appl. Phys. Lett. 59, 3443 (1991).
4. S. ACOSTA-ORTIZ and A. LASTRA-MARTINEZ, Solid State Commun. 64, 809 (1987).
5. D. A. WOOLF, K. C. ROSE, J. RUMBERG, F. REINHARDT, S. J. MORRIS, W. RICHTER, and R. H. WILLIAMS, Phys. Rev. B 51, 4691 (1995).
6. G. S. PETRICH, A. M., BARIAN, J. E. MACDONALD, and P. I. COHEN, J. Vac. Sci. Technol. B 9, 2150 (1991).
7. M. PASHLEY, K. HABEREN, R. FEENSTRA, and P. KIRCHNER, Phys. Rev. B 48, 4612 (1993).
8. T. HASHIZUME, Y. ISHIKAWA, T. YOSHIDA, and H. HASEGAWA, Jpn. J. Appl. Phys. 37, 1626 (1998).
9. N. KUMAGAI, T. YASUDA, T. HANADA, and T. YAO, J. Cryst. Growth 214/215, 547 (2000).
10. K. HABERLAND, P. KURPAS, M. PRISTOVSEK, F. POSER, J.-T. ZETTLER, M. WEYERS, and W. RICHTER, Appl. Phys. A 68, 309 (1999).
11. Z. SOBIESIERSKI, D. I. WESTWOOD, and M. ELLIOT, Phys. Rev. B 56, 15277 (2000).
12. P. LAUTENSCHLAGER, M. GARRIGA, S. LOGOTHETIDIS, and M. CARDONA, Phys. Rev. B 35, 9174 (1987).
13. C. H. KUO, S. ANAND, R. DROOPAD, K. Y. CHOI, and G. N. MARACAS, J. Vac. Sci. Technol. B 12, 1214 (1994).
14. W. CHEN, M. DUMAS, D. MAO and A. KAHN, J. Vac. Sci. Technol. B 10, 1886 (1992).
15. M. KUBALL, M. K. KELLY, M. CARDONA, K. KOEHLER, and J. WAGNER, Phys. Rev. B 49, 16569 (1994).