Femtosecond laser microfabrication of 3D structures in Foturan glass

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6400, Issue , 2006, Pages

  Cheng, Ya ^a   Xu, Zhizhan ^a   Sugioka, Koji ^b   Midorikawa, Katsumi ^b  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

3D laser micromachining; Femtosecond laser; Lab on a chip; Microfluidics; Microoptics; Photosensitive glass; Resolution

Indexed keywords

CHIP SCALE PACKAGES; FABRICATION; LASER APPLICATIONS; MICROMACHINING; MICROOPTICS; OPTICAL RESOLVING POWER; PHOTOSENSITIVE GLASS;

FEMTOSECOND LASERS; FOCAL SPOT; MICROFLUIDICS; MICROPROCESSING TECHNIQUES;

NONLINEAR OPTICS;

EID: 33846224317     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.688375     Document Type: Conference Paper

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