Development of super-resolution optical inspection system for semiconductor defects using standing wave illumination shift

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6375, Issue , 2006, Pages

  Usuki, S ^a   Nishioka, H ^a   Takahashi, S ^a   Takamasu, K ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Optical inspection; Semiconductor defects; Standing wave illumination; Super resolution

Indexed keywords

CRYSTAL DEFECTS; DEFECTS; LIGHT SCATTERING; OPTICAL RESOLVING POWER; PHOTODETECTORS;

OPTICAL INSPECTION; STANDING WAVE ILLUMINATION; STANDING WAVES; SUPER-RESOLUTION;

OPTICAL SYSTEMS;

EID: 33846221963     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.690582     Document Type: Conference Paper

References (9)

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