Semiconductor wafer defect detection using digital holography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5041, Issue , 2003, Pages 183-193

  Schulze, Mark A ^a   Hunt, Martin A ^a   Voelkl, Edgar ^a   Hickson, Joel D ^a   Usry, William ^a   Smith, Randall G ^a   Bryant, Robert ^a   Thomas Jr , C E ^a  

^a nLine Corporation   (United States)

Author keywords

Digital holography; High aspect ratio inspection (HARI); Semiconductor metrology; Semiconductor wafer defects

Indexed keywords

ASPECT RATIO; CAMERAS; CHARGE COUPLED DEVICES; DEFECTS; HOLOGRAPHY; SCANNING ELECTRON MICROSCOPY; WAVEFRONTS;

DIGITAL HOLOGRAPHY; HIGH ASPECT RATIO INSPECTION (HARI);

SEMICONDUCTOR MATERIALS;

EID: 0242609382     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485237     Document Type: Conference Paper

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