Transparent ZnO thin film transistor array by means of plasma enhanced atomic layer deposition

Proceedings of International Meeting on Information Display

Volumn 2006, Issue , 2006, Pages 601-604

  Ko Park, Sang Hee ^a   Hwang, Chi Sun ^a   Kwack, Ho Sang ^a   Lee, Jung Ik ^a   Chu, Hye Yong ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ETCHING; PHOTOLITHOGRAPHY; THRESHOLD VOLTAGE; ULTRATHIN FILMS; ZINC OXIDE;

PLASMA ENHANCED ATOMIC LAYER DEPOSITION; TRANSISTOR ARRAYS; WET ETCHING;

THIN FILM TRANSISTORS;

EID: 33846160951     PISSN: 17387558     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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