Modeling and control of AFM-based nano-manipulation systems

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 2005, Issue , 2005, Pages 157-162

  El Rifai, Khalid ^a   El Rifai, Osamah ^a   Youcef Toumi, Kamal ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

AFM; Nano manipulation; Nano robotics

Indexed keywords

MICROCANTILEVER; NANO MANIPULATION; NANO ROBOTICS; PIEZOTUBE SCANNER; SWITCHING PARAMETERS;

ACTUATORS; ADAPTIVE CONTROL SYSTEMS; ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; PIEZOELECTRIC DEVICES; ROBUSTNESS (CONTROL SYSTEMS);

NANOTECHNOLOGY;

EID: 33846156258     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.2005.1570112     Document Type: Conference Paper

References (10)

1. O. M. El Rifai, and K. Youcef-Toumi. Dynamics of Contact-mode Atomic Force Microscopes, American Control Conference, Chicago, IL, June 2000.
2. O. M. El Rifai, and K. Youcef-Toumi. Coupling in Piezoelectric Tube Scanners Used in Scanning Probe Microscopes, American Control Conference, Arlington, VA, June 2001.
3. O. M. El Rifai, and K. Youcef-Toumi. Trade-offs and Performance Limitations in Atomic Force Microscope Feedback System, IFAC Symposium on Mechatronic Systems, Berkeley, CA. December 2002.
4. S. Grange, F. Conti, P. Helmer, P. Rouiller and Baur C. The Delta Haptic Device as a Nanomanipulator, SPIE Microrobotics and Microassembly III, Boston, MA, November 2001.
5. S. Horiguchi, M. Sitti, and H. Hashimoto. Visualization Interface for AFM-based Nano Manipulation, IEEE Int. Symp. on Industrial Electronics, Slovenia, July 1999.
6. Khalil, H. Nonlinear Systems, 2nd Ed., Prentice-Hall, 1995.
7. G. Li, N. Xi and M. Yu. Calibration of AFM Based Nanomanipulation System, IEEE Int. Conference on Robotics and Automation, New Orleans, LA, April 2004.
8. Liberzon, D., and A.S. Morse. Basic Problems in Stability and Design of Switched Systems. IEEE Control Systems Magazine, 19, pp. 59-70, 1999.
9. M. Sitti. Teleoperated and Automatic Nanomanipulation Systems using Atomic Force Microscope Probes, IEEE Conference on Decison and Control, Maui, Hawaii, December 2003.
10. T. Sulchek, G.G. Yaralioglu, C.F. Quate, and S.C. Minne. Characterization and optimization of scan speed for tapping-mode atomic force microscopy, Review of Scientific Instruments, 73(8), August 2002.