메뉴 건너뛰기




Volumn 16, Issue 5, 1999, Pages 1143-1156

Design and fabrication of blazed binary diffractive elements with sampling periods smaller than the structural cutoff

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTIVE OPTICS; ELECTROMAGNETIC FIELD THEORY; ETCHING; MATHEMATICAL MODELS; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; TITANIUM DIOXIDE;

EID: 0032606441     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.16.001143     Document Type: Article
Times cited : (334)

References (44)
  • 1
    • 0001193251 scopus 로고
    • Photolithographic fabrication of thin film lenses
    • L. d’Auria, J. P. Huignard, A. M. Roy, and E. Spitz, “Photolithographic fabrication of thin film lenses,” Opt. Commun. 5, 232-235 (1972).
    • (1972) Opt. Commun , vol.5 , pp. 232-235
    • D’Auria, L.1    Huignard, J.P.2    Roy, A.M.3    Spitz, E.4
  • 2
    • 0003760206 scopus 로고
    • Binary optics technology: The theory and design of multilevel diffractive optical elements
    • MIT, Cambridge, Mass
    • G. J. Swanson, “Binary optics technology: the theory and design of multilevel diffractive optical elements,” MIT Tech. Rep. 854 (MIT, Cambridge, Mass., 1989).
    • (1989) MIT Tech. Rep. 854
    • Swanson, G.J.1
  • 3
    • 0000577080 scopus 로고    scopus 로고
    • Multilayer technology for diffractive optical elements
    • B. Goebel, L. L. Wang, and T. Tschudi, “Multilayer technology for diffractive optical elements,” Appl. Opt. 35, 4490-4493 (1996).
    • (1996) Appl. Opt , vol.35 , pp. 4490-4493
    • Goebel, B.1    Wang, L.L.2    Tschudi, T.3
  • 4
    • 0038164024 scopus 로고
    • Efficient f/1 binary-optics microlenses in fused silica designed using vector diffraction theory
    • J. M. Finlan, K. M. Flood, and R. J. Bojko, “Efficient f/1 binary-optics microlenses in fused silica designed using vector diffraction theory,” Opt. Eng. 34, 3560-3564 (1995).
    • (1995) Opt. Eng , vol.34 , pp. 3560-3564
    • Finlan, J.M.1    Flood, K.M.2    Bojko, R.J.3
  • 5
    • 0001570505 scopus 로고
    • Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists
    • M. T. Gale, M. Rossi, J. Pedersen, and H. Schütz, “Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists,” Opt. Eng. 33, 3556-3566 (1994).
    • (1994) Opt. Eng , vol.33 , pp. 3556-3566
    • Gale, M.T.1    Rossi, M.2    Pedersen, J.3    Schütz, H.4
  • 6
    • 0000127255 scopus 로고    scopus 로고
    • Single-point diamond turning and replication of visible and near-infrared diffractive optical elements
    • C. G. Blough, M. Rossi, S. K. Mack, and R. L. Michaels, “Single-point diamond turning and replication of visible and near-infrared diffractive optical elements,” Appl. Opt. 36, 4648-4654 (1997).
    • (1997) Appl. Opt , vol.36 , pp. 4648-4654
    • Blough, C.G.1    Rossi, M.2    Mack, S.K.3    Michaels, R.L.4
  • 7
    • 84975609246 scopus 로고
    • Blazed gratings and fresnel lenses fabricated by electron-beam lithography
    • F. Fujita, H. Nishihara, and J. Koyama, “Blazed gratings and Fresnel lenses fabricated by electron-beam lithography,” Opt. Lett. 7, 578-580 (1982).
    • (1982) Opt. Lett , vol.7 , pp. 578-580
    • Fujita, F.1    Nishihara, H.2    Koyama, J.3
  • 8
    • 0007089317 scopus 로고
    • Electron beam writing of continuous resist profilesfor optical applications
    • J. M. Stauffer, Y. Oppliger, P. Regnault, L. Baraldi, and M. T. Gale, “Electron beam writing of continuous resist profilesfor optical applications,” J. Vac. Sci. Technol. B 10, 2526-2529 (1992).
    • (1992) J. Vac. Sci. Technol , vol.B10 , pp. 2526-2529
    • Stauffer, J.M.1    Oppliger, Y.2    Regnault, P.3    Baraldi, L.4    Gale, M.T.5
  • 9
    • 84975647298 scopus 로고
    • Diffraction-limited blazed reflection diffractive microlenses for oblique incidence fabricated by electron-beam lithography
    • T. Shiono and H. Ogawa, “Diffraction-limited blazed reflection diffractive microlenses for oblique incidence fabricated by electron-beam lithography,” Appl. Opt. 30, 3643-3649 (1991).
    • (1991) Appl. Opt , vol.30 , pp. 3643-3649
    • Shiono, T.1    Ogawa, H.2
  • 11
    • 84916931332 scopus 로고
    • Metallic delay lenses, bell syst
    • W. E. Kock, “Metallic delay lenses,” Bell Syst. Tech. J. 27, 58-82 (1948).
    • (1948) Tech. J , vol.27 , pp. 58-82
    • Kock, W.E.1
  • 12
    • 84975635732 scopus 로고
    • Binary gratings with increased efficiency
    • W. M. Farn, “Binary gratings with increased efficiency,” Appl. Opt. 31, 4453-4458 (1992).
    • (1992) Appl. Opt , vol.31 , pp. 4453-4458
    • Farn, W.M.1
  • 13
    • 0000321363 scopus 로고
    • Artificial distributed-index media fabricated by zero-order gratings
    • W. Stork, N. Streibl, H. Haidner, and P. Kipfer, “Artificial distributed-index media fabricated by zero-order gratings,” Opt. Lett. 16, 1921-1923 (1991).
    • (1991) Opt. Lett , vol.16 , pp. 1921-1923
    • Stork, W.1    Streibl, N.2    Haidner, H.3    Kipfer, P.4
  • 14
    • 0003186562 scopus 로고
    • Dielectric binary blazed gratings
    • H. Haidner, J. T. Sheridan, and N. Streibl, “Dielectric binary blazed gratings,” Appl. Opt. 32, 4276-4278 (1993).
    • (1993) Appl. Opt , vol.32 , pp. 4276-4278
    • Haidner, H.1    Sheridan, J.T.2    Streibl, N.3
  • 15
    • 0029306643 scopus 로고
    • Optimized binary, phase-only, diffractive optical element with subwavelength features for 1.55 gm
    • Z. Zhou and T. J. Drabik, “Optimized binary, phase-only, diffractive optical element with subwavelength features for 1.55 gm,” J. Opt. Soc. Am. A 12, 1104-1112 (1995).
    • (1995) J. Opt. Soc. Am , vol.A12 , pp. 1104-1112
    • Zhou, Z.1    Drabik, T.J.2
  • 16
    • 0028403743 scopus 로고
    • Binary high-frequency-carrier diffractive optical elements: Electromagnetic theory
    • E. Noponen and J. Turunen, “Binary high-frequency-carrier diffractive optical elements: electromagnetic theory,” J. Opt. Soc. Am. A 11, 1097-1109 (1994).
    • (1994) J. Opt. Soc. Am , vol.A11 , pp. 1097-1109
    • Noponen, E.1    Turunen, J.2
  • 17
    • 0004719904 scopus 로고    scopus 로고
    • Rigorous concept for the design of diffractive microlenses with high numerical apertures
    • M. Schmitz and O. Bryngdahl, “Rigorous concept for the design of diffractive microlenses with high numerical apertures,” J. Opt. Soc. Am. A 14, 901-906 (1997).
    • (1997) J. Opt. Soc. Am , vol.A14 , pp. 901-906
    • Schmitz, M.1    Bryngdahl, O.2
  • 18
    • 11744270626 scopus 로고    scopus 로고
    • Rigorous analysis and optimization of subwavelength-structured binary dielectric beam deflector gratings
    • M. Kuittinen, J. Turunen, and P. Vahimaa, “Rigorous analysis and optimization of subwavelength-structured binary dielectric beam deflector gratings,” J. Mod. Opt. 45, 133-142 (1998).
    • (1998) J. Mod. Opt , vol.45 , pp. 133-142
    • Kuittinen, M.1    Turunen, J.2    Vahimaa, P.3
  • 19
    • 0037567343 scopus 로고    scopus 로고
    • Binary subwavelength diffractive-lens design
    • J. N. Mait, D. W. Prather, and M. S. Mirtoznik, “Binary subwavelength diffractive-lens design,” Opt. Lett. 23, 1343-1345 (1998).
    • (1998) Opt. Lett , vol.23 , pp. 1343-1345
    • Mait, J.N.1    Prather, D.W.2    Mirtoznik, M.S.3
  • 21
    • 0000505936 scopus 로고    scopus 로고
    • Subwavelength structures and their use in diffractive optics
    • P. Kipfer, M. Collischon, H. Haidner, and J. Schwider, “Subwavelength structures and their use in diffractive optics,” Opt. Eng. 35, 726-731 (1996).
    • (1996) Opt. Eng , vol.35 , pp. 726-731
    • Kipfer, P.1    Collischon, M.2    Haidner, H.3    Schwider, J.4
  • 22
    • 84975574818 scopus 로고
    • High-efficiency subwavelength diffractive optical element in gaas for 975 nm
    • M. E. Warren, R. E. Smith, G. A. Vawter, and J. R. Wendt, “High-efficiency subwavelength diffractive optical element in GaAs for 975 nm,” Opt. Lett. 20, 1441-1443 (1995).
    • (1995) Opt. Lett , vol.20 , pp. 1441-1443
    • Warren, M.E.1    Smith, R.E.2    Vawter, G.A.3    Wendt, J.R.4
  • 23
    • 0029209690 scopus 로고
    • Diffractive phase elements on two-dimensional artificial dielectrics
    • F. T. Chen and H. G. Craighhead, “Diffractive phase elements on two-dimensional artificial dielectrics,” Opt. Lett. 121-123 (1995).
    • (1995) Opt. Lett , pp. 121-123
    • Chen, F.T.1    Craighhead, H.G.2
  • 24
    • 0000765270 scopus 로고    scopus 로고
    • Diffractive lens fabricated with mostly zeroth-order gratings
    • F. T. Chen and H. G. Craighead, “Diffractive lens fabricated with mostly zeroth-order gratings,” Opt. Lett. 21, 177-179 (1996).
    • (1996) Opt. Lett , vol.21 , pp. 177-179
    • Chen, F.T.1    Craighead, H.G.2
  • 25
    • 85010167074 scopus 로고    scopus 로고
    • Synthesis of subwavelength-pulse-width spatially modulated array illuminator for 0.633 gm
    • J. M. Miller, N. de Beaucoudrey, P. Chavel, E. Cambril, and H. Launois, “Synthesis of subwavelength-pulse-width spatially modulated array illuminator for 0.633 gm,” Opt. Lett.
    • Opt. Lett
    • Miller, J.M.1    De Beaucoudrey, N.2    Chavel, P.3    Cambril, E.4    Launois, H.5
  • 26
    • 85010095991 scopus 로고    scopus 로고
    • 1399-1401 (1996).
    • (1996)
  • 27
    • 0001178803 scopus 로고    scopus 로고
    • High-efficiency subwavelength diffractive element patterned in a high-refractive-index material for 633 nm
    • S. Astilean, Ph. Lalanne, P. Chavel, E. Cambril, and H. Launois, “High-efficiency subwavelength diffractive element patterned in a high-refractive-index material for 633 nm,” Opt. Lett. 23, 552-554 (1998).
    • (1998) Opt. Lett , vol.23 , pp. 552-554
    • Astilean, S.1    Lalanne, P.H.2    Chavel, P.3    Cambril, E.4    Launois, H.5
  • 28
    • 0000249491 scopus 로고    scopus 로고
    • Blazed binary subwavelength gratings with efficiencies larger than those of conventional echelette gratings
    • Ph. Lalanne, S. Astilean, P. Chavel, E. Cambril, and H. Launois, “Blazed binary subwavelength gratings with efficiencies larger than those of conventional echelette gratings,” Opt. Lett. 23, 1081-1083 (1998).
    • (1998) Opt. Lett , vol.23 , pp. 1081-1083
    • Lalanne, P.H.1    Astilean, S.2    Chavel, P.3    Cambril, E.4    Launois, H.5
  • 29
    • 0029307028 scopus 로고
    • Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings
    • M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, “Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings,” J. Opt. Soc. Am. A 12, 1068-1076 (1995).
    • (1995) J. Opt. Soc. Am , vol.A12 , pp. 1068-1076
    • Moharam, M.G.1    Grann, E.B.2    Pommet, D.A.3    Gaylord, T.K.4
  • 30
    • 0000343624 scopus 로고    scopus 로고
    • Highly improved convergence of the coupled-wave method for tm polarization
    • Ph. Lalanne and G. M. Morris, “Highly improved convergence of the coupled-wave method for TM polarization,” J. Opt. Soc. Am. A 13, 779-784 (1996).
    • (1996) J. Opt. Soc. Am , vol.A13 , pp. 779-784
    • Lalanne, P.H.1    Morris, G.M.2
  • 31
    • 0001150666 scopus 로고    scopus 로고
    • Efficient implementation of the coupled-wave method for metallic lamellar gratings in tm polarization
    • G. Granet and B. Guizal, “Efficient implementation of the coupled-wave method for metallic lamellar gratings in TM polarization,” J. Opt. Soc. Am. A 13, 1019-1023 (1996).
    • (1996) J. Opt. Soc. Am , vol.A13 , pp. 1019-1023
    • Granet, G.1    Guizal, B.2
  • 32
    • 0000438638 scopus 로고    scopus 로고
    • New formulation of the fourier modal method for crossed surface-relief gratings
    • L. Li, “New formulation of the Fourier modal method for crossed surface-relief gratings,” J. Opt. Soc. Am. A 14, 2758-2767 (1997).
    • (1997) J. Opt. Soc. Am , vol.A14 , pp. 2758-2767
    • Li, L.1
  • 33
    • 0000780138 scopus 로고    scopus 로고
    • Effective properties and band structures of lamellar subwavelength crystals: Plane-wave method revisited
    • Ph. Lalanne, “Effective properties and band structures of lamellar subwavelength crystals: plane-wave method revisited,” Phys. Rev. B 58, 9801 -9807 (1998).
    • (1998) Phys. Rev , vol.B58
    • Lalanne, P.H.1
  • 34
    • 0030241250 scopus 로고    scopus 로고
    • Use of fourier series in the analysis of discontinuous periodic structures
    • L. Li, “Use of Fourier series in the analysis of discontinuous periodic structures,” J. Opt. Soc. Am. A 13, 1870-1876 (1996).
    • (1996) J. Opt. Soc. Am , vol.A13 , pp. 1870-1876
    • Li, L.1
  • 35
    • 0028460004 scopus 로고
    • Limits of scalar diffraction theory for diffractive phase elements
    • D. A. Pommet, M. G. Moharam, and E. B. Grann, “Limits of scalar diffraction theory for diffractive phase elements,” J. Opt. Soc. Am. A 11, 1827-1834 (1994).
    • (1994) J. Opt. Soc. Am , vol.A11 , pp. 1827-1834
    • Pommet, D.A.1    Moharam, M.G.2    Grann, E.B.3
  • 36
    • 0001111482 scopus 로고    scopus 로고
    • Born approximation for the nonparaxial scalar treatment of thick phase gratings
    • W. Singer and H. Tiziani, “Born approximation for the nonparaxial scalar treatment of thick phase gratings,” Appl. Opt. 37, 1249-1255 (1997).
    • (1997) Appl. Opt , vol.37 , pp. 1249-1255
    • Singer, W.1    Tiziani, H.2
  • 37
    • 85010173810 scopus 로고
    • Binary optics technology: Theoretical limits on the diffraction efficiency of multilevel diffractive optical elements
    • MIT, Cambridge, Mass
    • G. J. Swanson, “Binary optics technology: theoretical limits on the diffraction efficiency of multilevel diffractive optical elements,” MIT Tech. Rep. 914 (MIT, Cambridge, Mass., 1991).
    • (1991) MIT Tech. Rep. 914
    • Swanson, G.J.1
  • 38
    • 0003529370 scopus 로고
    • Asymptotic analysis for periodic structures
    • J. L. Lions and G. Papanicolaou, eds., North-Holland, Amsterdam, Chap. 4
    • A. Bensoussan, J. L. Lions, and G. Papanicolaou, “Asymptotic analysis for periodic structures,” in Study in Mathematics and Its Applications, J. L. Lions and G. Papanicolaou, eds. (North-Holland, Amsterdam, 1978), Chap. 4.
    • (1978) Study in Mathematics and Its Applications
    • Bensoussan, A.1    Lions, J.L.2    Papanicolaou, G.3
  • 39
    • 0030261714 scopus 로고    scopus 로고
    • On the effective medium theory of subwavelength periodic structures
    • Ph. Lalanne and D. Lemercier-Lalanne, “On the effective medium theory of subwavelength periodic structures,” J. Mod. Opt. 43, 2063-2085 (1996).
    • (1996) J. Mod. Opt , vol.43 , pp. 2063-2085
    • Lalanne, P.H.1    Lemercier-Lalanne, D.2
  • 40
    • 0038125712 scopus 로고    scopus 로고
    • Effective medium theory of two-dimensional subwavelength gratings in the non-quasi-static limit
    • H. Kikuta, Y. Ohira, H. Kubo, and K. Iwata, “Effective medium theory of two-dimensional subwavelength gratings in the non-quasi-static limit,” J. Opt. Soc. Am. A 15, 1577-1585 (1998).
    • (1998) J. Opt. Soc. Am , vol.A15 , pp. 1577-1585
    • Kikuta, H.1    Ohira, Y.2    Kubo, H.3    Iwata, K.4
  • 41
    • 0028531768 scopus 로고
    • Artificial uniaxial and biaxial dielectrics with use of two-dimensional subwavelength binary gratings
    • E. B. Grann, M. G. Moharam, and D. A. Pommet, “Artificial uniaxial and biaxial dielectrics with use of two-dimensional subwavelength binary gratings,” J. Opt. Soc. Am. A 11, 2695-2703 (1994).
    • (1994) J. Opt. Soc. Am , vol.A11 , pp. 2695-2703
    • Grann, E.B.1    Moharam, M.G.2    Pommet, D.A.3
  • 42
  • 43
    • 0003196738 scopus 로고    scopus 로고
    • Electromagnetic analysis of fan-out gratings and diffractive lens arrays by field stitching
    • B. Layet and M. R. Taghizadeh, “Electromagnetic analysis of fan-out gratings and diffractive lens arrays by field stitching,” J. Opt. Soc. Am. A 14, 1554-1561 (1997).
    • (1997) J. Opt. Soc. Am , vol.A14 , pp. 1554-1561
    • Layet, B.1    Taghizadeh, M.R.2
  • 44
    • 0001381271 scopus 로고    scopus 로고
    • Analysis and synthesis of circular diffractive lens with local linear grating model and rigorous coupled-wave theory
    • Y. Sheng, D. Feng, and S. Larochelle, “Analysis and synthesis of circular diffractive lens with local linear grating model and rigorous coupled-wave theory,” J. Opt. Soc. Am. A 14, 1562-1568 (1997).
    • (1997) J. Opt. Soc. Am , vol.A14 , pp. 1562-1568
    • Sheng, Y.1    Feng, D.2    Larochelle, S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.