Spatial variability of critical dimensions

2005 Proceedings - 22nd International VLSI Multilevel Interconnection Conference, VMIC 2005

Volumn , Issue , 2005, Pages 539-546

  Friedberg, Paul ^a   Cheung, Willy ^a   Spanos, Costas J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREE OF CORRELATIONS; GATE LENGTH VARIATION; INTERMEDIATE REGIMES; NON-STATIONARY BEHAVIORS; SEPARATION DISTANCES; SPATIAL CORRELATION STRUCTURES; SPATIAL CORRELATIONS; SYSTEMATIC VARIATION;

COMPUTER SIMULATION; INTEGRATED CIRCUIT TESTING; MICROMETERS; PROCESS CONTROL; SEMICONDUCTOR DEVICE STRUCTURES;

STRUCTURAL DESIGN;

EID: 33846118531     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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