Effect of Ta getter on the quality of MgO tunnel barrier in the polycrystalline CoFeB/MgO/CoFeB magnetic tunnel junction

Applied Physics Letters

Volumn 90, Issue 1, 2007, Pages

  Choi, Y S ^a   Nagamine, Y ^a   Tsunekawa, K ^a   Maehara, H ^a   Djayaprawira, D D ^a   Yuasa, S ^b   Ando, K ^b  

^a Canon ANELVA Corporation ^*  (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETORESISTANCE; OXIDATION; POLYCRYSTALLINE MATERIALS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTOR JUNCTIONS; STOICHIOMETRY;

DEFECT DENSITY; MAGNETIC TUNNEL JUNCTION;

ELECTRON TUNNELING;

EID: 33846090272     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2426902     Document Type: Article

References (19)

1. J. Faure-Vincent, C. Tiusan, E. Jouguelet, F. Canet, M. Sajieddine, C. Bellouard, E. Popova, M. Hehn, F. Montaigne, and A. Schuhl, Appl. Phys. Lett. 82, 4507 (2003).
2. S. Yuasa, A. Fukushima, T. Nagahama, Y. Suzuki, and K. Ando, Nat. Mater. 3, 868 (2004).
3. W. H. Butler, X. G. Zhang, T. C. Schulthess, and J. M. MacLaren, Phys. Rev. B 63, 054416 (2001).
4. J. Mathon and A. Umerski, Phys. Rev. B 63, 220403 (2001).
5. S. S. P. Parkin, C. Kaiser, A. Panchula, P. M. Rice, B. Hughes, M. Samant, and S. H. Yang, Nat. Mater. 3, 862 (2004).
6. D. D. Djayaprawira, K. Tsunekawa, M. Nagai, H. Maehara, S. Yamagata, N. Watanabe, S. Yuasa, Y. Suzuki, and K. Ando, Appl. Phys. Lett. 86, 092502 (2005).
7. E. Tan, P. G. Mather, A. C. Perrella, J. C. Read, and R. A. Buhrman, Phys. Rev. B 71, 161401 (R) (2005).
8. K. Tsunekawa, D. D. Djayaprawira, M. Nagai, H. Maehara, S. Yamagata, N. Watanabe, S. Yuasa, Y. Suzuki, and K. Ando, Appl. Phys. Lett. 87, 072503 (2005).
9. Y. Nagamine, H. Maehara, K. Tsunekawa, D. D. Djayaprawira, N. Watanabe, S. Yuasa, and K. Ando, Appl. Phys. Lett. 89, 162507 (2006).
10. Y. S. Choi, K. Tsunekawa, Y. Nagamine, and D. D. Djayaprawira, J. Appl. Phys. 0021-8979 (in press); also K. Tsunekawa, Y. S. Choi, Y. Nagamine, D. D. Djayaprawira, T. Tekeuchi, and Y. Kitamoto, Jpn. J. Appl. Phys., Part 2 45, L1152 (2006).
11. Y. S. Choi, K. Tsunekawa, Y. Nagamine, and D. D. Djayaprawira, J. Appl. Phys. 0021-8979 (in press); also K. Tsunekawa, Y. S. Choi, Y. Nagamine, D. D. Djayaprawira, T. Tekeuchi, and Y. Kitamoto, Jpn. J. Appl. Phys., Part 2 45, L1152 (2006).
12. D. C. Worledge and P. L. Trouilloud, Appl. Phys. Lett. 83, 84 (2003).
13. P. A. Thiel and T. E. Madey, Surf. Sci. Rep. 7, 211 (1987).
14. W. F. Egelhoff, P. J. Chen, C. J. Powell, M. D. Stiles, R. D. McMichael, J. H. Judy, K. Takano, and A. D. Berkowitz, J. Appl. Phys. 82, 6142 (1997).
15. N. H. de Leeuw, G. W. Watson, and S. C. Parker, J. Chem. Soc., Faraday Trans. 92, 2081 (1996).
16. S. Verdier, N. van der Laak, S. Delalande, J. Metson, and F. Dalard, Appl. Surf. Sci. 235, 513 (2004).
17. D. Li, M. Sumiya, S. Fuke, D. Yang, D. Que, Y. Suzuki, and Y. Fukuda, J. Appl. Phys. 90, 4219 (2001).
18. T. Brudevoll, E. A. Kotomin, and N. E. Christensen, Phys. Rev. B 53, 7731 (1996).
19. W. Wulfhenkel, M. Klaua, D. Ullmann, F. Zavaliche, J. Kirschner, R. Urban, T. Monchesky, and B. Heinrich, Appl. Phys. Lett. 78, 509 (2001).