High-reflectivity CrSc multilayer condenser for compact soft x-ray microscopy

Review of Scientific Instruments

Volumn 77, Issue 12, 2006, Pages

  Stollberg, H ^a   Yulin, S ^b   Takman, P A C ^a   Hertz, H M ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM COMPOUNDS; MAGNETRON SPUTTERING; MULTILAYERS; NUMERICAL ANALYSIS; OPTICAL MICROSCOPY; REFLECTION;

D-SPACING MATCHING; MULTILAYER MIRRORS; WATER-WINDOW X-RAY MICROSCOPES;

CAPACITORS;

EID: 33846081459     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2400665     Document Type: Article

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