Off-axis reflection zone plate for quantitative soft x-ray source characterization

Applied Physics Letters

Volumn 71, Issue 2, 1997, Pages 190-192

  Wilhein, T ^a   Hambach, D ^a   Niemann, B ^a   Berglund, M ^b   Rymell, L ^b   Hertz, H M ^b  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

^b LUND INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; CHARGE COUPLED DEVICES; DIFFRACTION GRATINGS; LIGHT SOURCES; OPTICAL VARIABLES MEASUREMENT; REFLECTION; SPATIAL VARIABLES MEASUREMENT; X RAY SPECTROSCOPY;

BRILLIANCE MEASUREMENTS; OFF AXIS REFLECTION ZONE PLATE; PHOTON FLUX; PULSED SOFT X RAY SOURCES;

X RAY SPECTROGRAPHS;

EID: 0031192537     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119497     Document Type: Article

References (13)

1. F. Bijkerk, E. Louis, M. J. van der Wiel, E. C. I. Turcu, G. J. Tallents, and D. Batani, J. X-Ray Sci. Technol. 3, 133 (1992).
2. X-Ray Microscopy and Spectromicroscopy, edited by J. Thieme, G. Schmahl, D. Rudolph, and E. Umbach (Springer, Heidelberg, to be published).
3. E.-E. Koch, D. E. Eastman, and Y. Farge, in Handbook on Synchrotron Radiation, edited by E.-E. Koch (North Holland, Amsterdam, 1983), p. 42.
4. Proceedings of the European Workshop on X-Ray Detectors for Synchrotron Radiation Sources, edited by A. H. Walenta, Siegen, Germany, 1991.
5. H. Petersen, C. Jung, C. Hellwig, W. B. Peatman, and W. Gudat, Rev. Sci. Instrum. 66, 1 (1995).
6. B. Niemann, Patent Application No. 195 42679.7, German Patent Office (Muenchen Nov. 1995).
7. A. Snigirev, in X-ray Microbeam Technology and Applications, Proceedings SPIE, edited by W. Yun (SPIE, Bellingham, WA, 1995), Vol. 2516, p. 27.
8. K. Holldack, A. Erko, T. Noll, and W. B. Peatman, Nucl. Instrum. Methods Phys. Res. A 365, 40 (1995).
9. B. Niemann, T. Wilhein, T. Schliebe, R. Plontke, O. Fortagne, I. Stolberg, and M. Zierbock, Microelectron. Eng. 30, 49 (1996).
10. T. Wilhein, D. Rothweiler, A. Tusche, F. Scholze, and W. Meyer-Ilse, in X-ray Microscopy IV, edited by V. V. Aristov and A. I. Erko (Bogorodskii Pechatnik, Chernogolovka, Moscow Region, 1994), p. 470.
11. L. Rymell and H. M. Hertz, Opt. Commun. 103, 105 (1993); L. Rymell, M. Berglund, and H. M. Hertz, Appl. Phys. Lett. 66, 2625 (1995).
12. L. Rymell and H. M. Hertz, Opt. Commun. 103, 105 (1993); L. Rymell, M. Berglund, and H. M. Hertz, Appl. Phys. Lett. 66, 2625 (1995).
13. M. Berglund, L. Rymell, and H. M. Hertz, Appl. Phys. Lett. 69, 1683 (1996).