High - Performance Cr/Sc multilayers for the soft X-ray range

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5193, Issue , 2004, Pages 172-176

  Yulin, Sergiy ^a   Schäfers, Franz ^b   Feigl, Torsten ^a   Kaiser, Norbert ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b HAHN MEITNER INSTITUT   (Germany)

Author keywords

Cr Sc; Multilayers; Reflectivity; Soft X rays; Thermal stability

Indexed keywords

ABSORPTION; ANNEALING; CHROMIUM ALLOYS; COMPUTER SIMULATION; DEPOSITION; LIGHT REFLECTION; MULTILAYERS; SURFACE ROUGHNESS; THERMODYNAMIC STABILITY; X RAY MICROSCOPES; X RAY SCATTERING;

CR/SC; SOFT X-RAYS;

X RAY ANALYSIS;

EID: 1942453808     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.505688     Document Type: Conference Paper

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