Investigation of the leakage mechanism in Sr-Ta-O and Bi-Ta-O thin film capacitors

Journal of Applied Physics

Volumn 100, Issue 12, 2006, Pages

  Goux, L ^a   Wouters, D J ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; DIELECTRIC MATERIALS; ELECTRIC CONDUCTIVITY; LEAKAGE CURRENTS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING BISMUTH COMPOUNDS; THIN FILM DEVICES;

AMORPHOUS LAYERS; CONDUCTION BAND; PROCESS FLOW; THIN FILM CAPACITORS;

CAPACITORS;

EID: 33846071980     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2401947     Document Type: Article

References (10)

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