Uncooled microbolometer detector: Recent developments at Ulis

Infrared Physics and Technology

Volumn 49, Issue 3 SPEC. ISS., 2007, Pages 187-191

  Fieque B ^a   Tissot, J L ^a   Trouilleau, C ^a   Crastes, A ^a   Legras, O ^a  

^a ULIS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; BOLOMETERS; INDUSTRIAL FURNACES; INFRARED IMAGING; PROCESS CONTROL;

FOCAL PLANE ARRAYS; INDUSTRIAL FURNACES CONTROL; MASS PRODUCTION; MICROBOLOMETER DETECTORS;

INFRARED DETECTORS;

EID: 33845982602     PISSN: 13504495     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.infrared.2006.06.030     Document Type: Article

References (4)

1. Vedel C., Martin J.L., Ouvrier-Buffet J.L., Tissot J.L., Vilain M., and Yon J.J. Amorphous silicon based uncooled microbolometer IRFPA. Proceedings of SPIE, Infrared Technology and Application XXV vol. 3698 (1999), SPIE, Bellingham, WA
2. J.L. Tissot, M. Vilain, A. Crastes, S. Tinnes, A. Larre, O. Legras, J.J. Yon, Uncooled IRFPA with high performance and low thermal time constant, in: SPIE Proceedings, Defence & Security, London, vol. 5612, October 25-28, 2004.
3. Trouilleau C., Crastes A., Legras O., Tissot J.L., and Chatard J.P. 35 μm pitch at Ulis, a breakthrough. SPIE Proceedings, paper 5783-64 vol. 5783 (2005), SPIE, Orlando
4. J.J. Yon, A. Astier, S. Bisotto, G. Chamings, A. Durand, J.L. Martin, E. Mottin, J.L. Ouvrier-Buffet, J.L. Tissot, First demonstration of 25 μm pitch uncooled amorphous silicon microbolometer IRFPA at LETI-LIR, in: SPIE Proceedings, vol. 5783, 2005.