35 μm pitch at ULIS, a breakthrough

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5783, Issue PART II, 2005, Pages 578-585

  Trouilleau, C ^a   Crastes, A ^a   Legras, O ^a   Tissot, J L ^a   Chatard, J P ^a  

^a ULIS   (France)

Author keywords

35 m pitch; Amorphous silicon; DVE; IRFPA; Microbolometer; Uncooled IR detector

Indexed keywords

BOLOMETERS; ELECTRIC RESISTANCE; PRODUCT DEVELOPMENT; TECHNOLOGY TRANSFER;

35ΜM PITCH; DVE; IRFPA; MICROBOLOMETER; UNCOOLED IR DETECTOR;

AMORPHOUS SILICON;

EID: 26444539824     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.605336     Document Type: Conference Paper

References (4)

1. C. Vedel, J.L. Martin, J.L. Ouvrier-Buffet, J.L. Tissot, M. Vilain, J.J. Yon, "Amorphous silicon based uncooled microbolometer IRFPA", in Proceeding of SPIE Vol. 3698, "Infrared Technology and Application XXV", (SPIE Bellingham, WA, 1999).
2. C. Trouilleau, A.Crastes, J.L. Tissot, J.P. Chatard, S. Tinnes "Amorphous silicon based uncooled microbolometer IRFPA", in Proceeding of SPIE Vol. 5251, "Detectors and associated Signal Processing", (SPIE St Etienne, France, 2003).
3. th 2004"
4. J.J.Yon, A.Astier, S.Bisotto, G.Chamings, A.Durand, J.L.Martin, E.Mottin, J.L.Ouvrier-Buffet, J.L.Tissot "First demonstration of 25μm pitch uncooled amorphous silicon microbolometer IRFPA at LETI-LIR" This conference.