Uncooled IRFPA with high-performance and low-thermal time constant

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5612, Issue , 2004, Pages 72-77

  Tissot, J L ^a   Vilain, M ^a   Crastes, A ^a   Tinnes, S ^a   Larre, A ^a   Legras, O ^a   Yon, J J ^b  

^a ULIS   (France)

^b CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; BOLOMETERS; CAMERAS; CMOS INTEGRATED CIRCUITS; ELECTROOPTICAL EFFECTS; INFRARED IMAGING; PHOTOLITHOGRAPHY; SENSITIVITY ANALYSIS;

DIGITAL CAMERAS; INFRARED FOCAL PLANE ARRAYS; MICROBOLOMETERS; QUANTUM DETECTORS;

INFRARED DETECTORS;

EID: 17644391366     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.578227     Document Type: Conference Paper

References (2)

1. J.L. Tissot, A. Astier, J.P. Chatard, S. Tinnes, C.Trouilleau, J.J. Yon "Low cost amorphous silicon based 160 × 120 uncooled microbolometer 2D array for high volume applications", in Proceeding of SPIE Vol. 5074, Infrared Technology and Applications XXIX, edited by Bjorn F. Andresen, Gabor F. Fulop, (SPIE Bellingham, WA, 2003), p 511-517
2. C. Vedel, J.L. Martin, J.L. Ouvrier-Buffet, J.L. Tissot, M. Vilain, J.J. Yon, "Amorphous silicon based uncooled microbolometer IRFPA", in Proceeding of SPIE Vol. 3698, "Infrared Technology and Application XXV", (SPIE Bellingham, WA, 1999).