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Volumn 415, Issue 1-2, 2006, Pages 140-144

Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering

(7) Liu, Youming a,c Li, Liuhe a,b Xu, Ming a Cai, Xun a Chen, Qiulong a Hu, Yawei a Chu, Paul K c

a SHANGHAI JIAO TONG UNIVERSITY (China)

b BEIHANG UNIVERSITY (China)

c CITY UNIVERSITY OF HONG KONG (Hong Kong)

Author keywords

Adhesion strength; Frictional behavior; Nitrogen ion implantation; TiN films

Indexed keywords

ADHESION; ALUMINUM; AUGER ELECTRON SPECTROSCOPY; FILMS; FRICTION; ION IMPLANTATION; MAGNETRON SPUTTERING; NITROGEN; SURFACE PROPERTIES; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

ADHESION STRENGTH; FRICTIONAL BEHAVIOR; NITROGEN ION IMPLANTATION;

TITANIUM NITRIDE;

SPUTTERING;

EID: 29244491683 PISSN: 09215093 EISSN: None Source Type: Journal
DOI: 10.1016/j.msea.2005.09.063 Document Type: Article

Times cited : (14)

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