Effect of nitrogen ion-implantation on the tribological properties and hardness of TiN films

Materials Science and Engineering: A

Volumn 253, Issue 1-2, 1998, Pages 319-327

  Manory, R R ^a   Li, C L ^b   Fountzoulas, C ^d   Demaree, J D ^d   Hirvonen, J K ^d   Nowak, R ^c  

^a RMIT UNIVERSITY   (Australia)

^b OSAKA UNIVERSITY   (Japan)

^c NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

^d NONE

Author keywords

Ion implantation; TiN film; Tribological properties; Ultra microhardness

Indexed keywords

INDENTATION; ION BEAM TREATMENT; ULTRA MICROHARDNESS;

CHEMICAL VAPOR DEPOSITION; ELECTRON ENERGY LEVELS; FILM GROWTH; HARDNESS; ION BOMBARDMENT; ION IMPLANTATION; MECHANICAL PROPERTIES; MECHANICAL VARIABLES MEASUREMENT; TRIBOLOGY;

TITANIUM NITRIDE;

EID: 0000948861     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0921-5093(98)00743-6     Document Type: Article

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