Relevance of surface roughness to tungsten sputtering and carbon implantation

Journal of Applied Physics

Volumn 100, Issue 11, 2006, Pages

  Bizyukov, Ivan ^a   Krieger, Karl ^b   Azarenkov, Nikolay ^a   Toussaint, Udo V ^b  

^a V N KARAZIN KHARKIV NATIONAL UNIVERSITY   (Ukraine)

^b MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; KINEMATICS; MAGNETRON SPUTTERING; MONTE CARLO METHODS; SCANNING ELECTRON MICROSCOPY; TUNGSTEN COMPOUNDS;

CARBON IMPLANTATION; CARBON ION BOMBARDMENT; INCIDENT FLUX; WEIGHT-LOSS MEASUREMENTS;

SURFACE ROUGHNESS;

EID: 33845899948     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2400393     Document Type: Article

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