The effect of diffusion and overhangs/vacancies on the microstructure of zig-zag thin film

Applied Surface Science

Volumn 253, Issue 6, 2007, Pages 3004-3008

  Qi, H J ^a   Shao, J D ^a   Zhang, D P ^a   Yi, K ^a   Fan, Z X ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

Author keywords

Growth model; Simulation

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; DIFFUSION; MICROSTRUCTURE; MONTE CARLO METHODS;

GROWTH MODEL; PACKING DENSITY;

THIN FILMS;

EID: 33845728099     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.06.043     Document Type: Article

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