Fabrication of titanium microchannels using laser-assisted thermochemical wet etching

Journal of Laser Applications

Volumn 18, Issue 2, 2006, Pages 131-137

  Son, S W ^a   Lee, M K ^a   Oh, K H ^a   Jeong, S H ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

High aspect ratio; Laser etching; Laser microfabrication; Microchannel

Indexed keywords

ASPECT RATIO; BUBBLE FORMATION; ETCHING; LASER APPLICATIONS; TITANIUM;

ETCHANT CONCENTRATION; LASER ETCHING; LASER MICROFABRICATION; MICROCHANNELS;

MICROSTRUCTURE;

EID: 33845672736     PISSN: 1042346X     EISSN: None     Source Type: Journal    
DOI: 10.2351/1.2164473     Document Type: Article

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